{
  "abstract": "Hexagonal boron nitride (h-BN) has attracted significant interest in the semiconductor industry due to its wide bandgap (5.95 eV), high anisotropic thermal conductivity, and low dielectric constant. However, the formation of crystalline h-BN conventionally requires high processing temperatures, which are incompatible with back-end-of-line (BEOL) integration and advanced packaging processes that must remain below 400 °C to avoid degradation of front-end devices. In this work, trichloroborazine (TCB) was systematically investigated using ammonia as the nitrogen co-reactant under both plasma-enhanced atomic layer deposition (PEALD) and atomic layer annealing (ALA) conditions. In the ALA process, low-energy inert ions are shown to enable in situ crystallization at temperatures well below those required for conventional MOCVD. As a result, highly ordered, vertically aligned polycrystalline h-BN films were deposited within a BEOL-compatible temperature window of 300–400 °C. The as-deposited ALA h-BN films exhibited clear signatures of cross-plane quasi-ballistic phonon transport over a thickness range of 20–50 nm, characterized by a thickness-independent effective thermal resistance of ∼6–9 m2 K GW–1. This invariance with film thickness indicates that phonon mean free paths exceed the film thickness, confirming quasi-ballistic heat transport enabled by the high crystallinity and preferential vertical alignment of the h-BN domains.",
  "abstract_shown": true,
  "affiliations": [
    "University of California, San Diego , , , ,",
    "Georgia Institute of Technology , , , ,",
    "EMD Electronics , 3011 N First Street , , ,"
  ],
  "article_type": "research article",
  "arxiv": null,
  "author_total": 16,
  "authors": [
    {
      "affs": [
        0
      ],
      "name": "Ping-Che Lee",
      "orcid": "0000-0002-6480-0037"
    },
    {
      "affs": [
        1
      ],
      "name": "Mingeun Choi",
      "orcid": "0009-0009-5721-0678"
    },
    {
      "affs": [
        0
      ],
      "name": "Diego Contreras Mora"
    },
    {
      "affs": [
        0
      ],
      "name": "Amy Ross"
    },
    {
      "affs": [
        0
      ],
      "name": "SeongUk Yun",
      "orcid": "0000-0002-1821-6753"
    },
    {
      "affs": [
        0
      ],
      "name": "Dipayan Pal",
      "orcid": "0000-0003-0008-3259"
    },
    {
      "affs": [
        0
      ],
      "name": "Dohyun Go"
    },
    {
      "affs": [
        0
      ],
      "name": "Jit Dutta",
      "orcid": "0009-0000-6396-1667"
    },
    {
      "affs": [
        0
      ],
      "name": "Xinyu Wang"
    },
    {
      "affs": [
        2
      ],
      "name": "Mark Clark"
    },
    {
      "affs": [
        2
      ],
      "name": "Larry Chen"
    },
    {
      "affs": [
        2
      ],
      "name": "Ravindra Kanjolia"
    },
    {
      "affs": [
        2
      ],
      "name": "Mansour Moinpour"
    },
    {
      "affs": [
        2
      ],
      "name": "Haripin Chandra"
    },
    {
      "affs": [
        1
      ],
      "name": "Satish Kumar"
    },
    {
      "affs": [
        0
      ],
      "name": "Andrew C. Kummel",
      "orcid": "0000-0001-8301-9855"
    }
  ],
  "bibtex": "https://research.draconitic.com/paper/2hmd77qth3j5n.bib",
  "cited_by": 0,
  "doi": "10.1021/acsomega.6c05339",
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  "landing_url": "https://pubs.acs.org/acsodf/article/11/42/64801/5452187/Quasi-Ballistic-Thermal-Transport-in-Vertically",
  "language": "eng",
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  "licence_url": "https://creativecommons.org/licenses/by-nc-nd/4.0/",
  "metadata_licence": null,
  "native_subjects": [
    [
      "heading",
      "Article"
    ],
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      "openalex",
      "2505|Thermal properties of materials"
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  "pdf_url": "https://pubs.acs.org/doi/pdf/10.1021/acsomega.6c05339",
  "pmcid": "PMC13717804",
  "pmid": "42959955",
  "published": "2026-10-15",
  "publisher": "American Chemical Society (ACS)",
  "ris": "https://research.draconitic.com/paper/2hmd77qth3j5n.ris",
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  "subjects": [
    {
      "field": "chemistry",
      "origin": "openalex:2505|Thermal properties of materials",
      "subfield": "materials-polymers"
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  ],
  "title": "Quasi-Ballistic Thermal Transport in Vertically Aligned h-BN",
  "title_text": "Quasi-Ballistic Thermal Transport in Vertically Aligned h-BN",
  "type": "peer-reviewed",
  "updated_at": "2026-11-02T12:22:03Z",
  "url": "https://research.draconitic.com/paper/2hmd77qth3j5n",
  "venue": "ACS Omega",
  "versions": []
}