{
  "abstract": "Direct growth of single-crystalline $\\mathrm{LiNbO_3}$ films with technologically relevant nonpolar orientations and a single ferroelectric domain state remains challenging. Here, we demonstrate the epitaxial growth of a 320-nm-thick, single-domain $42°$ YX-oriented $\\mathrm{LiNbO_3}$ film on a congruent $42°$ YX-cut $\\mathrm{LiTaO_3}$ substrate by direct liquid injection chemical vapor deposition. The deposition temperature was limited to $600°\\mathrm{C}$ to preserve the ferroelectric domain state of the $\\mathrm{LiTaO_3}$ substrate. X-ray diffraction confirmed that the $\\mathrm{LiNbO_3}$ film inherited the substrate orientation and domain state and exhibited no detectable secondary phases. The LN rocking-curve full width at half maximum was $0.011°$, approaching the instrumental resolution and demonstrating its high crystalline quality. Single-port leaky surface acoustic wave (LSAW) resonators with a wavelength of $4\\,μ\\mathrm{m}$ were fabricated on the $\\mathrm{LiNbO_3/LiTaO_3}$ heterostructure and on a bare $\\mathrm{LiTaO_3}$ reference substrate. At approximately 1 GHz, the $\\mathrm{LiNbO_3/LiTaO_3}$-based resonators exhibited an electromechanical coupling coefficient of about 13%, compared to 8.5% for the reference $\\mathrm{LiTaO_3}$-based resonators. These results demonstrate that direct epitaxial growth can produce high-quality, strongly piezoelectric $\\mathrm{LiNbO_3}$ films and provide a route toward thickness-controlled layered substrates for high-performance acoustic devices.",
  "abstract_shown": true,
  "affiliations": [],
  "article_type": null,
  "arxiv": "2610.24639",
  "author_total": 10,
  "authors": [
    {
      "name": "Mikhail Mirushchenko"
    },
    {
      "name": "Roland Salut"
    },
    {
      "name": "Ludovic Gauthier-Manuel"
    },
    {
      "name": "Vincent Astié"
    },
    {
      "name": "Samuel Margueron"
    },
    {
      "name": "Jean-Manuel Decams"
    },
    {
      "name": "Yuancheng Ji"
    },
    {
      "name": "Farshad F. Bolamiri"
    },
    {
      "name": "Ventsislav Yantchev"
    },
    {
      "name": "Ausrine Bartasyte"
    }
  ],
  "bibtex": "https://research.draconitic.com/paper/2zz52k6ga5kyq.bib",
  "cited_by": 0,
  "doi": "10.48550/arxiv.2610.24639",
  "fulltext_url": null,
  "id": "2zz52k6ga5kyq",
  "issns": [],
  "landing_url": "https://arxiv.org/abs/2610.24639",
  "language": null,
  "licence": "CC-BY-NC-ND-4.0",
  "licence_label": "CC BY-NC-ND 4.0",
  "licence_source": "article",
  "licence_url": "http://creativecommons.org/licenses/by-nc-nd/4.0/",
  "metadata_licence": "CC0-1.0",
  "native_subjects": [
    [
      "arxiv",
      "cond-mat.mtrl-sci"
    ],
    [
      "openalex",
      "2204|Acoustic Wave Resonator Technologies"
    ]
  ],
  "openalex": "W7222999789",
  "pdf_url": "https://arxiv.org/pdf/2610.24639",
  "pmcid": null,
  "pmid": null,
  "published": "2026-10-17",
  "publisher": null,
  "ris": "https://research.draconitic.com/paper/2zz52k6ga5kyq.ris",
  "sources": [
    {
      "first_seen": "2026-10-30T12:30:52Z",
      "native_id": "2610.24639",
      "source": "arxiv",
      "url": "https://arxiv.org/abs/2610.24639"
    }
  ],
  "subjects": [
    {
      "field": "physics",
      "origin": "arxiv:cond-mat.mtrl-sci",
      "subfield": "condensed-matter"
    }
  ],
  "title": "Shear SAW piezoelectricity of single-crystalline $\\mathrm{LiNbO_3}$ films grown on $42^{\\circ}$ YX-$\\mathrm{LiTaO_3}$ substrates by DLI-CVD",
  "title_text": "Shear SAW piezoelectricity of single-crystalline LiNbO_3 films grown on 42^∘ YX-LiTaO_3 substrates by DLI-CVD",
  "type": "preprint",
  "updated_at": "2026-10-30T12:33:41Z",
  "url": "https://research.draconitic.com/paper/2zz52k6ga5kyq",
  "venue": "arXiv",
  "versions": []
}