{
  "abstract": "Vacuum package integrity in micro- and nanoelectromechanical resonators is commonly assessed through the quality factor Q, although Q probes residual-gas damping rather than the surface-state evolution that can govern frequency aging. Here, we disentangle the pressure responses of Q and the resonance frequency f0 in a 64.21 MHz Al0.7Sc0.3N-on-silicon cross-sectional Lamé-mode resonator between 0.01 to 760 Torr. Measurements at 25 °C and at the 68.8°C frequency turnover, where first-order thermal sensitivity is suppressed, reveal widely separated equilibration timescales. Following each pressure step, Q reaches a reversible, history-independent steady value on the pressure-control timescale and approaches a fitted pressure-independent ceiling of 8.5e4 below approximately 1 Torr. By contrast, f0 responds measurably down to 1e-5 Torr and remains history-dependent, relaxing for hours at fixed pressure. The transients follow stretched-exponential kinetics, consistent with a broad distribution of surface relaxation rates, and individual pressure steps produce fractional frequency shifts as large as 1.9 ppm. Ten-hour phase-locked measurements show a common short-term time-deviation floor near 1e-10 s from 0.01 to 100 Torr, whereas residual deterministic relaxation dominates at long averaging times; at 760 Torr, gas damping degrades short-term tracking through the reduced Q. These results establish gas-damping equilibrium and frequency equilibrium as distinct states. Quality-factor saturation alone is therefore insufficient to qualify vacuum packaging for precision mechanical frequency references; package specifications must also constrain surface-mediated frequency aging.",
  "abstract_shown": true,
  "affiliations": [],
  "article_type": null,
  "arxiv": "2608.28959",
  "author_total": 6,
  "authors": [
    {
      "name": "S M Enamul Hoque Yousuf"
    },
    {
      "name": "Mahmudul Hasan"
    },
    {
      "name": "Shruti Mishra"
    },
    {
      "name": "Sourav Mukherjee"
    },
    {
      "name": "Jinghan Gao"
    },
    {
      "name": "Roozbeh Tabrizian"
    }
  ],
  "bibtex": "https://research.draconitic.com/paper/3668waykx0dmw.bib",
  "cited_by": 0,
  "doi": "10.48550/arxiv.2608.28959",
  "fulltext_url": null,
  "id": "3668waykx0dmw",
  "issns": [],
  "landing_url": "https://arxiv.org/abs/2608.28959",
  "language": null,
  "licence": "CC-BY-4.0",
  "licence_label": "CC BY 4.0",
  "licence_source": "article",
  "licence_url": "http://creativecommons.org/licenses/by/4.0/",
  "metadata_licence": "CC0-1.0",
  "native_subjects": [
    [
      "arxiv",
      "cond-mat.mes-hall"
    ],
    [
      "openalex",
      "2204|Acoustic Wave Resonator Technologies"
    ]
  ],
  "openalex": "W7204949428",
  "pdf_url": "https://arxiv.org/pdf/2608.28959",
  "pmcid": null,
  "pmid": null,
  "published": "2026-08-29",
  "publisher": null,
  "ris": "https://research.draconitic.com/paper/3668waykx0dmw.ris",
  "sources": [
    {
      "first_seen": "2026-10-30T12:17:41Z",
      "native_id": "2608.28959",
      "source": "arxiv",
      "url": "https://arxiv.org/abs/2608.28959"
    }
  ],
  "subjects": [
    {
      "field": "physics",
      "origin": "arxiv:cond-mat.mes-hall",
      "subfield": "condensed-matter"
    }
  ],
  "title": "Surface-mediated frequency aging beyond quality-factor saturation in an AlScN-on-silicon resonator",
  "title_text": "Surface-mediated frequency aging beyond quality-factor saturation in an AlScN-on-silicon resonator",
  "type": "preprint",
  "updated_at": "2026-10-30T12:17:41Z",
  "url": "https://research.draconitic.com/paper/3668waykx0dmw",
  "venue": "arXiv",
  "versions": []
}