{
  "abstract": "The ring-type rotational microelectromechanical systems (MEMS) traveling-wave ultrasonic micromotor has emerged as an important candidate for micro- and small-scale precision rotary actuation because of its thin-film structure, low driving voltage, less electromagnetic interference, and strong potential for system-level integration. In recent years, continuous advances in MEMS wafer processing, lead zirconate titanate (PZT) thin-film deposition and etching, and multi-layer interconnect packaging have driven substantial progress in micro-stator design, output performance, online sensing, motion control, and application validation of ring-type rotational MEMS traveling-wave ultrasonic micromotors (R-MTWUMs). Centered on the framework of design, detection, control, and application, this review systematically summarizes the development of R-MTWUMs. It first outlines their operating principles and representative fabrication processes, and then critically reviews the evolution of micro-stator configurations from substrate supported structures to nodal circle anchored and flexibly supported structures, and further to stator teeth and ball-amplified structures. Key performance metrics, including quality factor, driving voltage, torque, and rotation speed, are comparatively analyzed. On this basis, the review further summarizes the main detection methods used for R-MTWUMs, discusses recent progress in angular position sensing, driving and control, feedback electrode-based mode monitoring, and closed-loop control, and assesses their application potential through the application validation. Finally, this review summarizes major development trends, discusses the remaining challenges in fabrication, mechanism, evaluation, on-chip sensing, and closed-loop control, and outlines future research directions to accelerate the transition of R-MTWUMs from laboratory prototypes to practical engineering systems.",
  "abstract_shown": true,
  "affiliations": [
    "Institute of AI for Industries, Chinese Academy of Sciences, Nanjing, China.",
    "Jiangsu Key Laboratory of AI for Industries, Nanjing, China.",
    "Institute of Computing Technology, Chinese Academy of Sciences, Beijing, China.",
    "School of Mechanical Engineering, Nanjing University of Science and Technology, Nanjing, China. zhoutong@njust.edu.cn.",
    "Institute of AI for Industries, Chinese Academy of Sciences, Nanjing, China. chhsong@iaii.ac.cn.",
    "Jiangsu Key Laboratory of AI for Industries, Nanjing, China. chhsong@iaii.ac.cn."
  ],
  "article_type": "review article",
  "arxiv": null,
  "author_total": 10,
  "authors": [
    {
      "affs": [
        0,
        1,
        2
      ],
      "name": "Jinxuan Xie",
      "orcid": "0000-0001-8293-9131"
    },
    {
      "affs": [
        0,
        1
      ],
      "name": "Chu Wang"
    },
    {
      "affs": [
        0
      ],
      "name": "Longchao Dong"
    },
    {
      "affs": [
        0
      ],
      "name": "Zhibo Zhang"
    },
    {
      "affs": [
        0,
        1
      ],
      "name": "Hao Zhou"
    },
    {
      "affs": [
        0,
        1
      ],
      "name": "Yinlong Zhang"
    },
    {
      "affs": [
        0,
        1
      ],
      "name": "Yong Sun"
    },
    {
      "affs": [
        0,
        1
      ],
      "name": "Yiming Sun"
    },
    {
      "affs": [
        3
      ],
      "name": "Tong Zhou"
    },
    {
      "affs": [
        4,
        5
      ],
      "name": "Chunhe Song"
    }
  ],
  "bibtex": "https://research.draconitic.com/paper/3f0xhey0edmwr.bib",
  "cited_by": 0,
  "doi": "10.1038/s41378-026-01479-8",
  "fulltext_url": "https://europepmc.org/articles/PMC13720210",
  "id": "3f0xhey0edmwr",
  "issns": [
    "2096-1030",
    "2055-7434"
  ],
  "landing_url": "https://europepmc.org/article/MED/42957671",
  "language": "eng",
  "licence": "CC-BY-NC-ND",
  "licence_label": "CC BY-NC-ND",
  "licence_source": "article",
  "licence_url": "https://creativecommons.org/licenses/by-nc-nd/4.0/",
  "metadata_licence": null,
  "native_subjects": [
    [
      "heading",
      "Review Article"
    ],
    [
      "openalex",
      "2207|Piezoelectric Actuators and Control"
    ]
  ],
  "openalex": "W7224465715",
  "pdf_url": "https://europepmc.org/articles/PMC13720210?pdf=render",
  "pmcid": "PMC13720210",
  "pmid": "42957671",
  "published": "2026-10-28",
  "publisher": "Nature Publishing Group",
  "ris": "https://research.draconitic.com/paper/3f0xhey0edmwr.ris",
  "sources": [
    {
      "first_seen": "2026-11-01T00:20:36Z",
      "native_id": "MED:42957671",
      "source": "europepmc",
      "url": "https://europepmc.org/article/MED/42957671"
    },
    {
      "first_seen": "2026-11-02T12:24:02Z",
      "native_id": "PMC13720210",
      "source": "pmc",
      "url": "https://doi.org/10.1038/s41378-026-01479-8"
    }
  ],
  "subjects": [],
  "title": "A review of ring-type rotational MEMS traveling-wave ultrasonic micromotors: design, detection, control, and application validation.",
  "title_text": "A review of ring-type rotational MEMS traveling-wave ultrasonic micromotors: design, detection, control, and application validation.",
  "type": "peer-reviewed",
  "updated_at": "2026-11-03T12:21:08Z",
  "url": "https://research.draconitic.com/paper/3f0xhey0edmwr",
  "venue": "Microsystems & nanoengineering",
  "versions": []
}