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    "Yunnan Lincang Xinyuan Germanium Industry Co., Ltd., Lincang 677000, China;",
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    "Yunnan Xinyao Semiconductor Materials Co., Ltd., Kunming 650503, China; (H.W.); (H.L.); (S.W.); (T.L.)",
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      "name": "Changlin Li"
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      "name": "Tinglong Liu"
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  "published": "2026-09-22",
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  "subjects": [],
  "title": "Pareto-Guided Process Optimization of Single-Crystal InP Chemical Mechanical Polishing: Balancing Material Removal Rate and Surface Roughness",
  "title_text": "Pareto-Guided Process Optimization of Single-Crystal InP Chemical Mechanical Polishing: Balancing Material Removal Rate and Surface Roughness",
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  "updated_at": "2026-10-30T12:21:51Z",
  "url": "https://research.draconitic.com/paper/3vy6exydt7f4a",
  "venue": "Micromachines",
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