{
  "abstract": "Nanoscale transistors demand aggressive scaling of all channel dimensions—length, width and thickness. Two-dimensional semiconductors (2DS) provide the ultimate thickness limit, yet good device performance has largely remained restricted to micrometre-wide channels. Here we report monolayer 2DS nanoribbon transistors with both n- and p-type operation, fabricated by a top-down multipatterning process that includes ‘anchored’ contacts to limit nanoribbon delamination. This approach achieves channel lengths and widths down to 25–30 nm, with minimal edge degradation confirmed through nanoscale characterization, including tip-enhanced photoluminescence. Integrated with thin high- κ gate dielectrics, the devices deliver on-state currents up to 560, 420 and 130 µA µm −1 at a drain-to-source voltage of 1 V for n-type MoS 2 , n-type WS 2 and p-type WSe 2 , respectively. These results exceed prior single-gated 2DS nanoribbon reports, with WS 2 improving by more than two orders of magnitude, even for normally off (enhancement-mode) operation. Overall, these findings position top-down patterned 2DS nanoribbons as promising building blocks for future nanosheet transistor architectures.",
  "abstract_shown": true,
  "affiliations": [
    "Department of Electrical Engineering, Stanford University, Stanford, CA, USA. tara.pena@stanford.edu",
    "Department of Electrical Engineering, Stanford University, Stanford, CA, USA. anton.persson@chalmers.se",
    "Department of Microtechnology and Nanoscience, Chalmers University of Technology, Gothenburg, Sweden. anton.persson@chalmers.se",
    "HORIBA Scientific, Novato, CA, USA",
    "Department of Materials Science & Engineering, Stanford University, Stanford, CA, USA",
    "Department of Electrical Engineering, Stanford University, Stanford, CA, USA",
    "Geballe Laboratory for Advanced Materials, Stanford University, Stanford, CA, USA",
    "Stanford Institute for Materials and Energy Sciences, SLAC National Accelerator Laboratory, Menlo Park, CA, USA",
    "Precourt Institute for Energy, Stanford University, Stanford, CA, USA",
    "Stanford Synchrotron Radiation Lightsource (SSRL), SLAC National Accelerator Laboratory, Menlo Park, CA, USA",
    "Department of Applied Physics, Stanford University, Stanford, CA, USA. epop@stanford.edu",
    "Department of Electrical Engineering, Stanford University, Stanford, CA, USA. epop@stanford.edu",
    "Department of Materials Science & Engineering, Stanford University, Stanford, CA, USA. epop@stanford.edu",
    "Precourt Institute for Energy, Stanford University, Stanford, CA, USA. epop@stanford.edu",
    "Stanford Synchrotron Radiation Lightsource (SSRL), SLAC National Accelerator Laboratory, Menlo Park, CA, USA. epop@stanford.edu"
  ],
  "article_type": null,
  "arxiv": null,
  "author_total": 16,
  "authors": [
    {
      "affs": [
        0
      ],
      "name": "Tara Peña",
      "orcid": "0000-0002-8404-9543"
    },
    {
      "affs": [
        1,
        2
      ],
      "name": "Anton E. O. Persson",
      "orcid": "0000-0003-0895-096X"
    },
    {
      "affs": [
        3
      ],
      "name": "Andrey Krayev",
      "orcid": "0000-0001-7590-4002"
    },
    {
      "affs": [
        4
      ],
      "name": "Ashildur Fridriksdottir",
      "orcid": "0000-0003-0506-9544"
    },
    {
      "affs": [
        5,
        6
      ],
      "name": "Haotian Su",
      "orcid": "0009-0002-7113-0390"
    },
    {
      "affs": [
        4
      ],
      "name": "Yuan-Mau Lee"
    },
    {
      "affs": [
        5
      ],
      "name": "Young Suh Song",
      "orcid": "0000-0002-5229-1693"
    },
    {
      "affs": [
        5
      ],
      "name": "Kathryn M. Neilson",
      "orcid": "0000-0003-1061-2919"
    },
    {
      "affs": [
        4
      ],
      "name": "Zhepeng Zhang",
      "orcid": "0000-0002-9870-0720"
    },
    {
      "affs": [
        5,
        4
      ],
      "name": "Anh Tuấn Hoàng",
      "orcid": "0000-0003-0911-1391"
    },
    {
      "affs": [
        5
      ],
      "name": "Jerry A. Yang",
      "orcid": "0000-0001-5521-8523"
    },
    {
      "affs": [
        5
      ],
      "name": "Lauren Hoang",
      "orcid": "0009-0001-7556-8560"
    },
    {
      "affs": [
        5,
        4,
        6
      ],
      "name": "Shan Xiang Wang",
      "orcid": "0000-0001-8420-9554"
    },
    {
      "affs": [
        4,
        7
      ],
      "name": "Andrew J. Mannix",
      "orcid": "0000-0003-4788-1506"
    },
    {
      "affs": [
        4,
        8,
        9
      ],
      "name": "Paul C. McIntyre",
      "orcid": "0000-0002-7498-831X"
    },
    {
      "affs": [
        10,
        11,
        12,
        13,
        14
      ],
      "name": "Eric Pop",
      "orcid": "0000-0003-0436-8534"
    }
  ],
  "bibtex": "https://research.draconitic.com/paper/60ry11hnpyaes.bib",
  "cited_by": 9,
  "doi": "10.1038/s41565-026-02161-w",
  "fulltext_url": null,
  "id": "60ry11hnpyaes",
  "issns": [
    "1748-3387",
    "1748-3395"
  ],
  "landing_url": "https://doi.org/10.1038/s41565-026-02161-w",
  "language": "en",
  "licence": "CC-BY",
  "licence_label": "CC BY",
  "licence_source": "journal",
  "licence_url": "https://creativecommons.org/licenses/by/4.0/",
  "metadata_licence": null,
  "native_subjects": [
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      "openalex",
      "2505|2D Materials and Applications"
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  "pdf_url": "https://www.nature.com/articles/s41565-026-02161-w.pdf",
  "pmcid": "PMC13293853",
  "pmid": "42230814",
  "published": "2026-06-01",
  "publisher": "Nature Portfolio",
  "ris": "https://research.draconitic.com/paper/60ry11hnpyaes.ris",
  "sources": [
    {
      "first_seen": "2026-10-30T13:27:00Z",
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      "url": "https://doi.org/10.1038/s41565-026-02161-w"
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  "subjects": [
    {
      "field": "chemistry",
      "origin": "openalex:2505|2D Materials and Applications",
      "subfield": "materials-polymers"
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  ],
  "title": "Scaling nanoribbon transistors with monolayer transition metal dichalcogenides",
  "title_text": "Scaling nanoribbon transistors with monolayer transition metal dichalcogenides",
  "type": "peer-reviewed",
  "updated_at": "2026-11-09T13:21:22Z",
  "url": "https://research.draconitic.com/paper/60ry11hnpyaes",
  "venue": "Nature Nanotechnology",
  "versions": []
}