{
  "abstract": "Here, we report the fabrication and characterization of single crystal diamond films on a two-inch wafer-scale containing three-dimensional layered structures of negatively charged nitrogen-vacancy color centers (NV$^{-}$). The (100)-oriented layered diamond films were grown by chemical vapor deposition (CVD) to create spatially separated regions of enhanced emission associated with NV$^{-}$ centers. Such localized emission enhancement as well as 2D and 3D arrays of spins could enable close-packed architectures for emerging quantum devices, such as data processors, memory cells, and magnetic sensors. A cyclic sequence of CVD growth and oxygen-plasma etching is employed, resulting in the in-situ formation of layered inverted pyramidal structures with flat $\\{$111$\\}$ sidewalls. These pits are subsequently overgrown by nitrogen-doped diamond to achieve NV$^{-}$-rich facets with a uniform N-V bond arrangement and improved nitrogen incorporation efficiency.",
  "abstract_shown": true,
  "affiliations": [],
  "article_type": null,
  "arxiv": "2610.03150",
  "author_total": 9,
  "authors": [
    {
      "name": "Vadim Lebedev"
    },
    {
      "name": "Alejandro Martínez-Méndez"
    },
    {
      "name": "Jesús Moreno-Meseguer"
    },
    {
      "name": "Jan Engels"
    },
    {
      "name": "Jürgen Weippert"
    },
    {
      "name": "Jan Kustermann"
    },
    {
      "name": "Felix Hoffmann"
    },
    {
      "name": "Javier Prior"
    },
    {
      "name": "Jan Jeske"
    }
  ],
  "bibtex": "https://research.draconitic.com/paper/6jd49w43crkvt.bib",
  "cited_by": 0,
  "doi": "10.48550/arxiv.2610.03150",
  "fulltext_url": null,
  "id": "6jd49w43crkvt",
  "issns": [],
  "landing_url": "https://arxiv.org/abs/2610.03150",
  "language": null,
  "licence": "LicenseRef-arXiv-nonexclusive-1.0",
  "licence_label": "arXiv licence",
  "licence_source": "article",
  "licence_url": "http://arxiv.org/licenses/nonexclusive-distrib/1.0/",
  "metadata_licence": "CC0-1.0",
  "native_subjects": [
    [
      "arxiv",
      "cond-mat.mtrl-sci"
    ],
    [
      "arxiv",
      "physics.optics"
    ],
    [
      "arxiv",
      "quant-ph"
    ],
    [
      "openalex",
      "2505|Diamond and Carbon-based Materials Research"
    ]
  ],
  "openalex": "W7220455115",
  "pdf_url": "https://arxiv.org/pdf/2610.03150",
  "pmcid": null,
  "pmid": null,
  "published": "2026-10-02",
  "publisher": null,
  "ris": "https://research.draconitic.com/paper/6jd49w43crkvt.ris",
  "sources": [
    {
      "first_seen": "2026-10-30T12:26:45Z",
      "native_id": "2610.03150",
      "source": "arxiv",
      "url": "https://arxiv.org/abs/2610.03150"
    }
  ],
  "subjects": [
    {
      "field": "physics",
      "origin": "arxiv:cond-mat.mtrl-sci",
      "subfield": "condensed-matter"
    },
    {
      "field": "physics",
      "origin": "arxiv:physics.optics",
      "subfield": "optics-photonics"
    },
    {
      "field": "physics",
      "origin": "arxiv:quant-ph",
      "subfield": "quantum"
    }
  ],
  "title": "Self-organized Layered Structures of Nitrogen-Vacancy Centers with Preferential Orientation in Heteroepitaxial Diamond Films",
  "title_text": "Self-organized Layered Structures of Nitrogen-Vacancy Centers with Preferential Orientation in Heteroepitaxial Diamond Films",
  "type": "preprint",
  "updated_at": "2026-10-30T12:26:45Z",
  "url": "https://research.draconitic.com/paper/6jd49w43crkvt",
  "venue": "arXiv",
  "versions": []
}