{
  "abstract": "Epitaxial thin films of the lithium ionic conductor Li3xLa(2/3-x)TiO3 were successfully grown on Al2O3 (0001) substrates by RF magnetron sputtering using a ceramic target containing 10 mol% excess Li. The effects of deposition temperature, Ar:O2 gas-flow ratio, and working pressure on film growth were systematically investigated. XRD revealed highly (112)-oriented tetragonal LLTO, with no consistent set of reflections attributable to secondary crystalline phases. Substrate-referenced azimuthal φ-scans of the representative film deposited at 650 °C confirmed a well-defined in-plane orientation relationship between LLTO and the Al2O3 (0001) substrate, with two symmetry-related rotational variants. The Ar:O2 ratio strongly affected the out-of-plane coherent domain size. SEM revealed changes in surface morphology with deposition temperature, while AFM showed a clear influence of the Ar:O2 gas-flow ratio on surface topography. XPS confirmed Li at the surface, with La and Ti predominantly present as La 3+ and Ti 4+ , respectively, together with a temperature-dependent variation in surface hydroxylation. Overall, based on the combined structural results and available morphological observations, 650 °C, Ar:O2 = 7:1 (i.e., oxygen-poor mixture), and 0.1 Torr were selected as favorable conditions within the investigated parameter range, supporting further development of LLTO thin films for all-solid-state pH-sensing applications.",
  "abstract_shown": true,
  "affiliations": [],
  "article_type": null,
  "arxiv": null,
  "author_total": 6,
  "authors": [
    {
      "name": "Thi Thuy Linh Nguyen"
    },
    {
      "name": "Zhizhong Li"
    },
    {
      "name": "Pham Tien Thanh"
    },
    {
      "name": "Diana Dragoe"
    },
    {
      "name": "Quoc Nghi Pham"
    },
    {
      "name": "Michel Andrieux"
    }
  ],
  "bibtex": "https://research.draconitic.com/paper/772vdgfs84byv.bib",
  "cited_by": 0,
  "doi": "10.1016/j.surfcoat.2026.134098",
  "fulltext_url": null,
  "id": "772vdgfs84byv",
  "issns": [
    "0257-8972",
    "1879-3347"
  ],
  "landing_url": "https://hal.science/hal-05850586v1",
  "language": "en",
  "licence": "CC-BY-4.0",
  "licence_label": "CC BY 4.0",
  "licence_source": "article",
  "licence_url": "https://creativecommons.org/licenses/by/4.0/",
  "metadata_licence": null,
  "native_subjects": [
    [
      "hal",
      "0.chim"
    ],
    [
      "hal",
      "1.chim.mate"
    ],
    [
      "openalex",
      "2208|Advanced Battery Materials and Technologies"
    ]
  ],
  "openalex": "W7224198437",
  "pdf_url": "https://hal.science/hal-05850586/document",
  "pmcid": null,
  "pmid": null,
  "published": "2026-11-04",
  "publisher": "Elsevier",
  "ris": "https://research.draconitic.com/paper/772vdgfs84byv.ris",
  "sources": [
    {
      "first_seen": "2026-11-04T12:20:53Z",
      "native_id": "hal-05850586",
      "source": "hal",
      "url": "https://hal.science/hal-05850586v1"
    }
  ],
  "subjects": [
    {
      "field": "chemistry",
      "origin": "hal:1.chim.mate",
      "subfield": "materials-polymers"
    }
  ],
  "title": "Low-Temperature Growth of Epitaxial Li3xLa(2/3-x)TiO3 Thin Films by RF Magnetron Sputtering",
  "title_text": "Low-Temperature Growth of Epitaxial Li3xLa(2/3-x)TiO3 Thin Films by RF Magnetron Sputtering",
  "type": "peer-reviewed",
  "updated_at": "2026-11-05T12:20:12Z",
  "url": "https://research.draconitic.com/paper/772vdgfs84byv",
  "venue": "Surface and Coatings Technology",
  "versions": []
}