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  "bibtex": "https://research.draconitic.com/paper/81052herytnre.bib",
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  "doi": "10.26434/chemrxiv.15008071/v1",
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  "published": "2026-08-31",
  "publisher": "American Chemical Society (ACS)",
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  "title": "On the role of surface oxidation for the nucleation delay in ALD of AlN",
  "title_text": "On the role of surface oxidation for the nucleation delay in ALD of AlN",
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