{
  "abstract": "Conductive metal–organic frameworks (MOFs) have emerged as promising electronic materials, yet their integration as functional components in semiconductor devices remains limited by challenges in device‐level fabrication. Here, we demonstrate chemical vapor deposition (CVD)‐grown Cu3(C6O6)2 thin films, a highly conductive two‐dimensional (2D) MOF, as gate electrodes, enabled by their suitable work function and stable electronic structure. A sequential APS–Cr etching strategy enables high‐conformity patterning of MOF thin films fully compatible with standard photolithographic processes, while preserving the integrity of the underlying device layers. Field‐effect transistors were realized across three technologically relevant semiconductor platforms, including n‐type MoS2, p‐type MoTe2, and indium gallium zinc oxide (IGZO), demonstrating the generality of Cu3(C6O6)2 MOF as a gate electrode material. The resulting devices exhibit transfer characteristics and charge mobilities comparable to conventional metal gates in MoS2, while large‐area IGZO transistor arrays show uniform and highly reproducible electrical performance. These results establish conductive MOF thin films as viable gate materials and expand their potential toward source–drain electrodes and even channel materials, in next‐generation semiconductor devices.",
  "abstract_shown": true,
  "affiliations": [
    "Department of Chemistry Pohang University of Science and Technology (POSTECH) Pohang Republic of Korea",
    "Van der Waals Materials Research Center Department of Physics Yonsei University Seodaemun‐gu Seoul Republic of Korea",
    "Department of Smart Green Technology Engineering Pukyong National University Busan Republic of Korea",
    "Department of Metallurgical Engineering Pukyong National University Busan Republic of Korea",
    "Department of Chemistry Korea Advanced Institute of Science and Technology (KAIST) Daejeon Republic of Korea"
  ],
  "article_type": "research article",
  "arxiv": null,
  "author_total": 10,
  "authors": [
    {
      "affs": [
        0
      ],
      "name": "Hyeonwoo Lee",
      "orcid": "0009-0003-6178-841X"
    },
    {
      "affs": [
        1
      ],
      "name": "Han Joo Lee"
    },
    {
      "affs": [
        0
      ],
      "name": "Myeonggeun Choe"
    },
    {
      "affs": [
        1
      ],
      "name": "Jeehong Park",
      "orcid": "0000-0001-9392-7849"
    },
    {
      "affs": [
        1
      ],
      "name": "Yeonjin Yi",
      "orcid": "0000-0003-4944-8319"
    },
    {
      "affs": [
        1
      ],
      "name": "Seongil Im"
    },
    {
      "affs": [
        2
      ],
      "name": "Suk Hyun Park"
    },
    {
      "affs": [
        0
      ],
      "name": "Hee Cheul Choi",
      "orcid": "0000-0003-1002-1262"
    },
    {
      "affs": [
        2,
        3
      ],
      "name": "Ji Hoon Park"
    },
    {
      "affs": [
        4
      ],
      "name": "Sarah S. Park",
      "orcid": "0000-0002-8770-6094"
    }
  ],
  "bibtex": "https://research.draconitic.com/paper/86r8t362h10x9.bib",
  "cited_by": 0,
  "doi": "10.1002/adma.75003",
  "fulltext_url": "https://pmc.ncbi.nlm.nih.gov/articles/PMC13726697/",
  "id": "86r8t362h10x9",
  "issns": [
    "0935-9648",
    "1521-4095"
  ],
  "landing_url": "https://doi.org/10.1002/adma.75003",
  "language": "en",
  "licence": "CC-BY-NC-ND-4.0",
  "licence_label": "CC BY-NC-ND 4.0",
  "licence_source": "article",
  "licence_url": "https://creativecommons.org/licenses/by-nc-nd/4.0/",
  "metadata_licence": null,
  "native_subjects": [
    [
      "heading",
      "Research Article"
    ],
    [
      "openalex",
      "2505|2D Materials and Applications"
    ]
  ],
  "openalex": "W7213338827",
  "pdf_url": "https://onlinelibrary.wiley.com/doi/pdfdirect/10.1002/adma.75003",
  "pmcid": "PMC13726697",
  "pmid": "42741988",
  "published": "2026-09-15",
  "publisher": null,
  "ris": "https://research.draconitic.com/paper/86r8t362h10x9.ris",
  "sources": [
    {
      "first_seen": "2026-11-05T12:22:59Z",
      "native_id": "PMC13726697",
      "source": "pmc",
      "url": "https://doi.org/10.1002/adma.75003"
    }
  ],
  "subjects": [
    {
      "field": "chemistry",
      "origin": "openalex:2505|2D Materials and Applications",
      "subfield": "materials-polymers"
    }
  ],
  "title": "Lithography‐Compatible Conductive Metal–Organic Frameworks for Scalable Electronics",
  "title_text": "Lithography‐Compatible Conductive Metal–Organic Frameworks for Scalable Electronics",
  "type": "peer-reviewed",
  "updated_at": "2026-11-06T12:22:35Z",
  "url": "https://research.draconitic.com/paper/86r8t362h10x9",
  "venue": "Advanced Materials (Deerfield Beach, Fla.)",
  "versions": []
}