{
  "abstract": "We report a scalable and low-thermal-budget growth of vertically aligned ZnO nanocolumns on Si(100) substrates by radio-frequency magnetron sputtering at temperatures of 80−100 °C. In this low-mobility growth regime, sputtering pressure controlled via the argon flow rate is the dominant parameter governing the morphological transition from dense columnar films to well-separated nanocolumns rather than the substrate temperature. High sputtering pressure enhances the self-shadowing effect, promoting the formation of well-separated nanocolumns under a limited adatom mobility regime. Conversely, low sputtering pressure facilitates void filling, yielding dense films with reduced surface roughness. Controlled preannealing of the Si substrate prior to deposition enables switching between O-polar and Zn-polar nanocolumns, plausibly attributed to modifications of the native SiOx surface chemistry. O-polar films and nanocolumns exhibit higher effective piezoelectric coefficients up to 20 pC/N. Their stable piezoelectric responses over 0.1−150 Hz correlate with higher differential resistance and reduced dielectric loss, suggesting the suppression of the carrier-induced screening effect. This work establishes a practical growth window compatible with thermally sensitive substrates, including those used in flexible and wearable electronics.",
  "abstract_shown": true,
  "affiliations": [],
  "article_type": null,
  "arxiv": "2602.14893",
  "author_total": 13,
  "authors": [
    {
      "name": "Alaa Hamzi"
    },
    {
      "name": "Laila Ouardas"
    },
    {
      "name": "Mostafa Saleh"
    },
    {
      "name": "Pimchanok Leuasoongnoen"
    },
    {
      "name": "Thita Sonklin"
    },
    {
      "name": "Philippe David"
    },
    {
      "name": "Simon Le Denmat"
    },
    {
      "name": "Olivier Leynaud"
    },
    {
      "name": "Eric Mossang"
    },
    {
      "name": "Bruno Fernandez"
    },
    {
      "name": "Soodkhet Pojprapai"
    },
    {
      "name": "Daniel Mornex"
    },
    {
      "name": "Rudeesun Songmuang"
    }
  ],
  "bibtex": "https://research.draconitic.com/paper/87jbq5p2rr48s.bib",
  "cited_by": 0,
  "doi": "10.1021/acsanm.6c00882",
  "fulltext_url": null,
  "id": "87jbq5p2rr48s",
  "issns": [
    "2574-0970"
  ],
  "landing_url": "https://hal.science/hal-05775814v1",
  "language": "en",
  "licence": "CC-BY-4.0",
  "licence_label": "CC BY 4.0",
  "licence_source": "article",
  "licence_url": "https://creativecommons.org/licenses/by/4.0/",
  "metadata_licence": null,
  "native_subjects": [
    [
      "hal",
      "0.phys"
    ],
    [
      "hal",
      "0.spi"
    ],
    [
      "openalex",
      "2505|ZnO doping and properties"
    ]
  ],
  "openalex": "W7163906072",
  "pdf_url": "https://hal.science/hal-05775814/document",
  "pmcid": null,
  "pmid": null,
  "published": "2026-06-08",
  "publisher": "American Chemical Society",
  "ris": "https://research.draconitic.com/paper/87jbq5p2rr48s.ris",
  "sources": [
    {
      "first_seen": "2026-10-30T12:17:54Z",
      "native_id": "hal-05775814",
      "source": "hal",
      "url": "https://hal.science/hal-05775814v1"
    }
  ],
  "subjects": [
    {
      "field": "chemistry",
      "origin": "openalex:2505|ZnO doping and properties",
      "subfield": "materials-polymers"
    }
  ],
  "title": "Low-Temperature Sputtering and Polarity Determination of Vertically Aligned ZnO Nanocolumns",
  "title_text": "Low-Temperature Sputtering and Polarity Determination of Vertically Aligned ZnO Nanocolumns",
  "type": "peer-reviewed",
  "updated_at": "2026-10-30T12:17:54Z",
  "url": "https://research.draconitic.com/paper/87jbq5p2rr48s",
  "venue": "ACS Applied Nano Materials",
  "versions": []
}