{
  "abstract": "A technology for the in situ formation of a three-layer TiN$_x$/Ti/TiN$_x$ functional material within a single vacuum cycle is presented, together with the results of investigations of its structural and electrophysical properties. The maximum critical power density reached approximately 140 MW/cm$^2$. Under continuous operation at 90% of the critical power, the structures remained operational for 24 h. The characteristics of microbridges without and with a protective SiO$_x$ layer were compared. The presence of the coating modifies the electrothermal operating regime of the structures and enables estimated temperatures of approximately 500-700 degrees Celsius to be reached.",
  "abstract_shown": true,
  "affiliations": [],
  "article_type": null,
  "arxiv": "2610.37130",
  "author_total": 9,
  "authors": [
    {
      "name": "Oleg A. Solovyev"
    },
    {
      "name": "Zakhar S. Enbaev"
    },
    {
      "name": "Alexander R. Shevchenko"
    },
    {
      "name": "Aleksander M. Mumlyakov"
    },
    {
      "name": "Pavel A. Berezhnoy"
    },
    {
      "name": "Mikael O. Geodakyan"
    },
    {
      "name": "Mikhail V. Tsvetkov"
    },
    {
      "name": "Michael A. Tarkhov"
    },
    {
      "name": "Igor V. Trofimov"
    }
  ],
  "bibtex": "https://research.draconitic.com/paper/9ebvwf7ddm4sx.bib",
  "cited_by": 0,
  "doi": "10.48550/arxiv.2610.37130",
  "fulltext_url": null,
  "id": "9ebvwf7ddm4sx",
  "issns": [],
  "landing_url": "https://arxiv.org/abs/2610.37130",
  "language": null,
  "licence": "LicenseRef-arXiv-nonexclusive-1.0",
  "licence_label": "arXiv licence",
  "licence_source": "article",
  "licence_url": "http://arxiv.org/licenses/nonexclusive-distrib/1.0/",
  "metadata_licence": "CC0-1.0",
  "native_subjects": [
    [
      "arxiv",
      "cond-mat.mtrl-sci"
    ],
    [
      "arxiv",
      "physics.ins-det"
    ],
    [
      "arxiv",
      "physics.optics"
    ],
    [
      "openalex",
      "2208|Advanced MEMS and NEMS Technologies"
    ]
  ],
  "openalex": "W7224106618",
  "pdf_url": "https://arxiv.org/pdf/2610.37130",
  "pmcid": null,
  "pmid": null,
  "published": "2026-10-27",
  "publisher": null,
  "ris": "https://research.draconitic.com/paper/9ebvwf7ddm4sx.ris",
  "sources": [
    {
      "first_seen": "2026-10-30T12:35:50Z",
      "native_id": "2610.37130",
      "source": "arxiv",
      "url": "https://arxiv.org/abs/2610.37130"
    }
  ],
  "subjects": [
    {
      "field": "physics",
      "origin": "arxiv:physics.ins-det",
      "subfield": "applied-instrumentation"
    },
    {
      "field": "physics",
      "origin": "arxiv:cond-mat.mtrl-sci",
      "subfield": "condensed-matter"
    },
    {
      "field": "physics",
      "origin": "arxiv:physics.optics",
      "subfield": "optics-photonics"
    }
  ],
  "title": "Study of Multilayer TiNx/Ti/TiNx Films Formed In Situ for High-Efficiency Integrated Microheaters",
  "title_text": "Study of Multilayer TiNx/Ti/TiNx Films Formed In Situ for High-Efficiency Integrated Microheaters",
  "type": "preprint",
  "updated_at": "2026-10-30T12:35:50Z",
  "url": "https://research.draconitic.com/paper/9ebvwf7ddm4sx",
  "venue": "arXiv",
  "versions": []
}