{
  "abstract": "Silicon-on-insulator is mostly the main driving material system for the field of silicon photonics, including PICs, due to high index contrast and compatibility with current semiconductor manufacturing processes [1]. A recent example is silicon oxynitride-doped silicon [2] discovered recently by our group, offering to set a new position for the fields of silicon photonics with a precise control of refractive index from 2.1 to 2.5 together with the photosensitivity property at different wavelengths. In this study, we demonstrate that the synthesis of silicon oxynitride-doped silicon can be performed on a flexible substrate for the fabrication of Bragg gratings (BG) at low temperatures below 100 degrees Celsius that are emerging for advanced applications. Their use in preserving ultra-fast lasers inscribed micro-information has been demonstrated numerically and experimentally due to its multispectral reflection behaviour from the ultraviolet (UV) to the near-infrared (NIR) regions. The unique structural characteristics of silicon oxynitride-doped silicon were studied at the Si L, O K and N K edges using soft X-ray absorption studies. The quantum mechanical calculations provide the potential formation mechanism of SiON-doped Si, whereas the crystal structure prediction for bulk Si3N4-xOx was conducted using the particle swarm optimization method in combination with density functional theory (DFT).",
  "abstract_shown": true,
  "affiliations": [],
  "article_type": null,
  "arxiv": "2610.25382",
  "author_total": 15,
  "authors": [
    {
      "name": "Ali Karatutlu"
    },
    {
      "name": "Timuçin Emre Tabaru"
    },
    {
      "name": "Umut Taylan"
    },
    {
      "name": "Zehra Gizem Mutlay"
    },
    {
      "name": "Doğukan Hazar Özbey"
    },
    {
      "name": "Okan Uslu"
    },
    {
      "name": "Hamid-Reza Bahari"
    },
    {
      "name": "Esra Kendir Tekgül"
    },
    {
      "name": "Andriy Budnyk"
    },
    {
      "name": "İremnur Duru"
    },
    {
      "name": "Mustafa Fatih Genisel"
    },
    {
      "name": "Zeynep Reyhan Öztürk"
    },
    {
      "name": "Taylan Gorkan"
    },
    {
      "name": "Engin Durgun"
    },
    {
      "name": "Bülend Ortaç"
    }
  ],
  "bibtex": "https://research.draconitic.com/paper/a346sjzt567d9.bib",
  "cited_by": 0,
  "doi": "10.48550/arxiv.2610.25382",
  "fulltext_url": null,
  "id": "a346sjzt567d9",
  "issns": [],
  "landing_url": "https://arxiv.org/abs/2610.25382",
  "language": null,
  "licence": "LicenseRef-arXiv-nonexclusive-1.0",
  "licence_label": "arXiv licence",
  "licence_source": "article",
  "licence_url": "http://arxiv.org/licenses/nonexclusive-distrib/1.0/",
  "metadata_licence": "CC0-1.0",
  "native_subjects": [
    [
      "arxiv",
      "physics.optics"
    ],
    [
      "openalex",
      "2206|Laser Material Processing Techniques"
    ]
  ],
  "openalex": "W7223051816",
  "pdf_url": "https://arxiv.org/pdf/2610.25382",
  "pmcid": null,
  "pmid": null,
  "published": "2026-10-18",
  "publisher": null,
  "ris": "https://research.draconitic.com/paper/a346sjzt567d9.ris",
  "sources": [
    {
      "first_seen": "2026-10-30T12:30:52Z",
      "native_id": "2610.25382",
      "source": "arxiv",
      "url": "https://arxiv.org/abs/2610.25382"
    }
  ],
  "subjects": [
    {
      "field": "physics",
      "origin": "arxiv:physics.optics",
      "subfield": "optics-photonics"
    }
  ],
  "title": "Design and synthesis of laser inscribed flexible Bragg gratings containing silicon oxynitride-doped silicon thin film for authentication applications with the insights from X-Ray Absorption Spectroscopy and Quantum Mechanical Calculations",
  "title_text": "Design and synthesis of laser inscribed flexible Bragg gratings containing silicon oxynitride-doped silicon thin film for authentication applications with the insights from X-Ray Absorption Spectroscopy and Quantum Mechanical Calculations",
  "type": "preprint",
  "updated_at": "2026-10-30T12:33:41Z",
  "url": "https://research.draconitic.com/paper/a346sjzt567d9",
  "venue": "arXiv",
  "versions": []
}