{
  "abstract": "Surface topography directly affects the functionality and performance of workpieces, while its high-accuracy and repeatable measurement is essential for quality control and precision manufacturing. White-light interferometry, benefiting from the unique advantages of broadband low-coherence light sources, enables high-accuracy measurement while effectively avoiding phase ambiguity and related issues, and therefore plays an important role in surface metrology. However, various error sources in practical measurements can cause deviations from ideal measurement conditions, directly affecting the accuracy and reliability of surface topography reconstruction. Therefore, an in-depth investigation of error mechanisms and the development of effective compensation strategies are essential for ensuring the measurement reliability of white-light interferometry and promoting its application in broader engineering scenarios. This review systematically examines error processing in white-light interferometry. The fundamental principles of white-light interferometry are first described based on an interferometric signal model. The potential error sources and their physical mechanisms are then analyzed in detail, covering environmental vibration, sample characteristics, the batwing effect, and algorithmic errors. Research progress over the past two decades in suppressing these errors is systematically classified and summarized. Based on these developments, future trends in white-light interferometry are further discussed. This review aims to provide a systematic theoretical reference and technical guidance for error analysis and performance improvement in white-light interferometry.",
  "abstract_shown": true,
  "affiliations": [
    "Center for Advanced Laser Technology, Hebei University of Technology, Tianjin, China",
    "Hebei Key Laboratory of Advanced Laser Technology and Equipment, Hebei University of Technology, Tianjin, China",
    "Tianjin Key Laboratory of Electronic Materials and Devices, Hebei University of Technology, Tianjin, China",
    "Department of Physics, The University of Auckland, Auckland, New Zealand"
  ],
  "article_type": null,
  "arxiv": null,
  "author_total": 13,
  "authors": [
    {
      "affs": [
        0
      ],
      "name": "Yudong Lian"
    },
    {
      "affs": [
        1
      ],
      "name": "Yudong Lian"
    },
    {
      "affs": [
        2
      ],
      "name": "Yudong Lian"
    },
    {
      "affs": [
        0
      ],
      "name": "Yifan Shan"
    },
    {
      "affs": [
        1
      ],
      "name": "Yifan Shan"
    },
    {
      "affs": [
        3
      ],
      "name": "Luyang Xie"
    },
    {
      "affs": [
        0
      ],
      "name": "Xinyu Wang"
    },
    {
      "affs": [
        1
      ],
      "name": "Xinyu Wang"
    },
    {
      "affs": [
        0
      ],
      "name": "Yulei Wang"
    },
    {
      "affs": [
        1
      ],
      "name": "Yulei Wang"
    },
    {
      "affs": [
        2
      ],
      "name": "Yulei Wang"
    },
    {
      "affs": [
        0
      ],
      "name": "Zhiwei Lu"
    },
    {
      "affs": [
        1
      ],
      "name": "Zhiwei Lu"
    }
  ],
  "bibtex": "https://research.draconitic.com/paper/a3pd7kv1d74dd.bib",
  "cited_by": 0,
  "doi": "10.3389/fphy.2026.1974701",
  "fulltext_url": "https://www.frontiersin.org/articles/10.3389/fphy.2026.1974701/full",
  "id": "a3pd7kv1d74dd",
  "issns": [
    "2296-424X"
  ],
  "landing_url": "https://doi.org/10.3389/fphy.2026.1974701",
  "language": "en",
  "licence": "CC-BY",
  "licence_label": "CC BY",
  "licence_source": "journal",
  "licence_url": "https://creativecommons.org/licenses/by/4.0/",
  "metadata_licence": null,
  "native_subjects": [
    [
      "lcc",
      "QC1-999"
    ],
    [
      "openalex",
      "1707|Optical measurement and interference techniques"
    ]
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  "openalex": "W7223283874",
  "pdf_url": "https://www.frontiersin.org/journals/physics/articles/10.3389/fphy.2026.1974701/pdf",
  "pmcid": null,
  "pmid": null,
  "published": "2026-10-23",
  "publisher": "Frontiers Media S.A.",
  "ris": "https://research.draconitic.com/paper/a3pd7kv1d74dd.ris",
  "sources": [
    {
      "first_seen": "2026-10-30T12:17:24Z",
      "native_id": "130a0785991a4876bc7a68a5008daea9",
      "source": "doaj",
      "url": "https://doi.org/10.3389/fphy.2026.1974701"
    }
  ],
  "subjects": [
    {
      "field": "physics",
      "origin": "lcc:QC1-999",
      "subfield": "general"
    }
  ],
  "title": "A review of error analysis and compensation methods in white-light interferometric surface topography measurement",
  "title_text": "A review of error analysis and compensation methods in white-light interferometric surface topography measurement",
  "type": "peer-reviewed",
  "updated_at": "2026-10-30T13:43:50Z",
  "url": "https://research.draconitic.com/paper/a3pd7kv1d74dd",
  "venue": "Frontiers in Physics",
  "versions": []
}