{
  "abstract": "Perfectly uniform and conformal thin films of materials are routinely deposited by chemical vapor deposition (CVD) for a range of applications, especially in the semiconductor industry. The most common way to enable highly conformal deposition is to operate the CVD process in the kinetically limited temperature regime, i.e., at the lower temperature range where the deposition chemistry is active. Here, we present the unexpected finding that a conformal CVD process is also available at very high temperatures. When doing CVD of boron carbide on freestanding carbon nanotubes (CNT) at 1000 °C, i.e., in the thermodynamically limited temperature regime, the process afforded fully conformal layer of boron carbide on the CNTs. In contrast, depositions at 700 and 850 °C afforded sub-conformal depositions. This result indicate a lower reaction probability caused by the enhanced desorption of growth species at higher temperatures.",
  "abstract_shown": true,
  "affiliations": [
    "Department of Physics, Chemistry and Biology",
    "Linköping University",
    "Canatu, Tiilenlyöjänkuja 9A, Vantaa, Finland, FI-01720"
  ],
  "article_type": null,
  "arxiv": null,
  "author_total": 8,
  "authors": [
    {
      "affs": [
        0,
        1
      ],
      "name": "Arun Haridas Choolakkal"
    },
    {
      "affs": [
        0,
        1
      ],
      "name": "Vladyslav Rogoz"
    },
    {
      "affs": [
        2
      ],
      "name": "Jarkko Etula"
    },
    {
      "affs": [
        2
      ],
      "name": "Emma Salmi"
    },
    {
      "affs": [
        2
      ],
      "name": "Taneli Juntunen"
    },
    {
      "affs": [
        0,
        1
      ],
      "name": "Grzegorz Greczynski"
    },
    {
      "affs": [
        0,
        1
      ],
      "name": "Jens Birch"
    },
    {
      "affs": [
        0,
        1
      ],
      "name": "Henrik Pedersen",
      "orcid": "0000-0002-7171-5383"
    }
  ],
  "bibtex": "https://research.draconitic.com/paper/c28kfpfa2v3fr.bib",
  "cited_by": 0,
  "doi": "10.26434/chemrxiv.15010841/v1",
  "fulltext_url": null,
  "id": "c28kfpfa2v3fr",
  "issns": [],
  "landing_url": "https://chemrxiv.org/doi/full/10.26434/chemrxiv.15010841/v1",
  "language": null,
  "licence": "CC-BY",
  "licence_label": "CC BY",
  "licence_source": "journal",
  "licence_url": "https://creativecommons.org/licenses/by/4.0/",
  "metadata_licence": null,
  "native_subjects": [
    [
      "openalex",
      "2505|Carbon Nanotubes in Composites"
    ]
  ],
  "openalex": "W7223174324",
  "pdf_url": "https://chemrxiv.org/doi/pdf/10.26434/chemrxiv.15010841/v1",
  "pmcid": null,
  "pmid": null,
  "published": "2026-10-22",
  "publisher": "American Chemical Society (ACS)",
  "ris": "https://research.draconitic.com/paper/c28kfpfa2v3fr.ris",
  "sources": [
    {
      "first_seen": "2026-10-30T12:17:24Z",
      "native_id": "10.26434/chemrxiv.15010841",
      "source": "chemrxiv",
      "url": "https://chemrxiv.org/doi/full/10.26434/chemrxiv.15010841/v1"
    }
  ],
  "subjects": [
    {
      "field": "chemistry",
      "origin": "openalex:2505|Carbon Nanotubes in Composites",
      "subfield": "materials-polymers"
    }
  ],
  "title": "Temperature Range",
  "title_text": "Temperature Range",
  "type": "preprint",
  "updated_at": "2026-10-30T12:17:24Z",
  "url": "https://research.draconitic.com/paper/c28kfpfa2v3fr",
  "venue": "ChemRxiv",
  "versions": []
}