{
  "abstract": "We report on the microstructural evolution of ZrN/SiN x bilayers and multilayers after He ions implantation, comparatively to their monolithic (i.e., ZrN and SiN x ) counterparts. Films with a total thickness of 300 nm are synthesized by reactive magnetron sputtering, and characterized by X-ray diffraction (XRD), transmission electron microscopy (TEM) and time-of-flight elastic recoil detection analysis (ToF-ERDA) in their as-deposited and implanted states (fluence of 7 × 10 16 ions/cm 2 ). The as-deposited multilayer ZrN/SiN x films are characterized by sharp interfaces that delineate amorphous SiN x and polycrystalline ZrN layers. Distinct microstructural evolutions after He implantation are revealed for the constitutive single-layers. The formation of cavities with typical size around 10 nm is observed in SiN x , accompanied by an extensive loss of He. For monolithic ZrN, the implanted He does not induce any visible extended defects, but causes lattice distortion, especially in <111>-oriented grains. The presence of interfaces does not significantly alter the overall radiation damage response (in relation to monolithic films), resulting in a relative macroscopic swelling of 10–15% for bilayer periods Λ between 8 and 42 nm. A detailed TEM investigation performed on the implanted multilayer with Λ = 20 nm reveals different depth-profiles of individual layer thickness expansion, originating from the He concentration profile for ZrN and damage profile for SiN x . ZrN monolithic films, characterized by a columnar growth morphology and exempt of He-induced cavities, show the best radiation resistance.",
  "abstract_shown": true,
  "affiliations": [],
  "article_type": null,
  "arxiv": null,
  "author_total": 8,
  "authors": [
    {
      "name": "N. Sénicourt"
    },
    {
      "name": "M.-L. David"
    },
    {
      "name": "K. Mizohata"
    },
    {
      "name": "F. Pailloux"
    },
    {
      "name": "K. Sarakinos"
    },
    {
      "name": "C. Tromas"
    },
    {
      "name": "Ph. Djemia"
    },
    {
      "name": "Grégory Abadias"
    }
  ],
  "bibtex": "https://research.draconitic.com/paper/ce4hw5z6e3w5x.bib",
  "cited_by": 1,
  "doi": "10.1016/j.surfcoat.2026.133510",
  "fulltext_url": null,
  "id": "ce4hw5z6e3w5x",
  "issns": [
    "0257-8972",
    "1879-3347"
  ],
  "landing_url": "https://cnrs.hal.science/hal-05766191v1",
  "language": "en",
  "licence": "CC-BY",
  "licence_label": "CC BY",
  "licence_source": "journal",
  "licence_url": "https://creativecommons.org/licenses/by/4.0/",
  "metadata_licence": null,
  "native_subjects": [
    [
      "hal",
      "0.chim"
    ],
    [
      "hal",
      "0.phys"
    ],
    [
      "hal",
      "1.chim.mate"
    ],
    [
      "hal",
      "1.phys.cond"
    ],
    [
      "openalex",
      "2505|Fusion materials and technologies"
    ]
  ],
  "openalex": "W7154917954",
  "pdf_url": null,
  "pmcid": null,
  "pmid": null,
  "published": "2026-09-27",
  "publisher": "Elsevier",
  "ris": "https://research.draconitic.com/paper/ce4hw5z6e3w5x.ris",
  "sources": [
    {
      "first_seen": "2026-10-30T12:17:41Z",
      "native_id": "hal-05766191",
      "source": "hal",
      "url": "https://cnrs.hal.science/hal-05766191v1"
    }
  ],
  "subjects": [
    {
      "field": "chemistry",
      "origin": "hal:1.chim.mate",
      "subfield": "materials-polymers"
    },
    {
      "field": "physics",
      "origin": "hal:1.phys.cond",
      "subfield": "condensed-matter"
    }
  ],
  "title": "On the radiation damage tolerance of multilayer and single-layer coatings within the ZrN/SiNx system subjected to helium ion implantation",
  "title_text": "On the radiation damage tolerance of multilayer and single-layer coatings within the ZrN/SiNx system subjected to helium ion implantation",
  "type": "peer-reviewed",
  "updated_at": "2026-10-30T12:17:41Z",
  "url": "https://research.draconitic.com/paper/ce4hw5z6e3w5x",
  "venue": "Surface and Coatings Technology",
  "versions": []
}