{
  "abstract": "Understanding stress evolution during growth in multicomponent metallic thin films is essential for controlling their structural and functional stability. Here, we investigate the effect of Ta content (0-60 at.%) on the microstructure and growth stress of TiZrHfTax thin films. Increasing Ta induces a transition from crystalline to amorphous microstructures and significantly modifies both the magnitude and sign of growth stress. Real-time wafer curvature measurements reveal depth-dependent stress variations associated with a peculiar amorphous/bcc dual-phase morphology. Our results provide new insights into stress evolution in refractory compositionally complex alloy films and demonstrate how intrinsic stresses can be tuned through chemistry and phase stability",
  "abstract_shown": true,
  "affiliations": [],
  "article_type": null,
  "arxiv": null,
  "author_total": 7,
  "authors": [
    {
      "name": "Hocine Slimani"
    },
    {
      "name": "Frédéric Pailloux"
    },
    {
      "name": "Chalopin Mériadeg"
    },
    {
      "name": "Jean-Baptiste Dubois"
    },
    {
      "name": "Philippe DJEMIA"
    },
    {
      "name": "Matteo Ghidelli"
    },
    {
      "name": "Grégory Abadias"
    }
  ],
  "bibtex": "https://research.draconitic.com/paper/crhzd9hdk2yvz.bib",
  "cited_by": 0,
  "doi": null,
  "fulltext_url": null,
  "id": "crhzd9hdk2yvz",
  "issns": [],
  "landing_url": "https://cnrs.hal.science/hal-05804780v1",
  "language": "en",
  "licence": "CC-BY-4.0",
  "licence_label": "CC BY 4.0",
  "licence_source": "article",
  "licence_url": "https://creativecommons.org/licenses/by/4.0/",
  "metadata_licence": null,
  "native_subjects": [
    [
      "hal",
      "0.chim"
    ],
    [
      "hal",
      "0.phys"
    ]
  ],
  "openalex": null,
  "pdf_url": "https://cnrs.hal.science/hal-05804780/document",
  "pmcid": null,
  "pmid": null,
  "published": "2026-10-18",
  "publisher": null,
  "ris": "https://research.draconitic.com/paper/crhzd9hdk2yvz.ris",
  "sources": [
    {
      "first_seen": "2026-10-30T12:17:58Z",
      "native_id": "hal-05804780",
      "source": "hal",
      "url": "https://cnrs.hal.science/hal-05804780v1"
    }
  ],
  "subjects": [
    {
      "field": "chemistry",
      "origin": "hal:0.chim",
      "subfield": "general"
    },
    {
      "field": "physics",
      "origin": "hal:0.phys",
      "subfield": "general"
    }
  ],
  "title": "How does stress evolve during growth of refractory compositionally complex alloy thin films?",
  "title_text": "How does stress evolve during growth of refractory compositionally complex alloy thin films?",
  "type": "preprint",
  "updated_at": "2026-10-30T12:17:58Z",
  "url": "https://research.draconitic.com/paper/crhzd9hdk2yvz",
  "venue": "HAL",
  "versions": []
}