{
  "abstract": "We experimentally investigate conventional and capacitively loaded traveling-wave RF electrodes fabricated on thermally grown SiO$_2$ on high-resistivity silicon substrates for high-speed electro-optic modulators. The capacitively loaded electrodes exhibit RF attenuation coefficients as low as approximately $0.23~\\mathrm{dB/cm}/\\sqrt{\\mathrm{GHz}}$, comparable to values reported for electrodes fabricated on insulating quartz substrates, while retaining the silicon handle and avoiding substrate removal or undercut processing. By varying the SiO$_2$ buried-oxide (BOX) thickness and the capacitive-loading geometry, the microwave effective index can be engineered over a broad range while maintaining low RF propagation loss. This enables microwave-optical velocity matching over a wide range of optical wavelengths, from the ultraviolet to the telecom C-band. These results demonstrate that thermally oxidized silicon provides a simple and scalable substrate platform for low-loss traveling-wave electrodes in thin-film lithium niobate and thin-film lithium tantalate electro-optic modulators, as well as for high-speed RF interconnects in integrated transceivers and co-packaged optical systems.",
  "abstract_shown": true,
  "affiliations": [],
  "article_type": null,
  "arxiv": "2609.21830",
  "author_total": 6,
  "authors": [
    {
      "name": "Ayed Sayem"
    },
    {
      "name": "Ting-Chen Hu"
    },
    {
      "name": "Mark Cappuzzo"
    },
    {
      "name": "Alaric Tate"
    },
    {
      "name": "Rose Kopf"
    },
    {
      "name": "Mark Earnshaw"
    }
  ],
  "bibtex": "https://research.draconitic.com/paper/e2j9pkchk3wek.bib",
  "cited_by": 0,
  "doi": "10.48550/arxiv.2609.21830",
  "fulltext_url": null,
  "id": "e2j9pkchk3wek",
  "issns": [],
  "landing_url": "https://arxiv.org/abs/2609.21830",
  "language": null,
  "licence": "CC-BY-4.0",
  "licence_label": "CC BY 4.0",
  "licence_source": "article",
  "licence_url": "http://creativecommons.org/licenses/by/4.0/",
  "metadata_licence": "CC0-1.0",
  "native_subjects": [
    [
      "arxiv",
      "physics.optics"
    ],
    [
      "openalex",
      "3107|Photorefractive and Nonlinear Optics"
    ]
  ],
  "openalex": "W7213916489",
  "pdf_url": "https://arxiv.org/pdf/2609.21830",
  "pmcid": null,
  "pmid": null,
  "published": "2026-09-18",
  "publisher": null,
  "ris": "https://research.draconitic.com/paper/e2j9pkchk3wek.ris",
  "sources": [
    {
      "first_seen": "2026-10-30T12:23:03Z",
      "native_id": "2609.21830",
      "source": "arxiv",
      "url": "https://arxiv.org/abs/2609.21830"
    }
  ],
  "subjects": [
    {
      "field": "physics",
      "origin": "arxiv:physics.optics",
      "subfield": "optics-photonics"
    }
  ],
  "title": "Performance of Capacitively Loaded RF Electrodes on SiO2/Si Substrates for High-Speed Electro-Optic Modulators",
  "title_text": "Performance of Capacitively Loaded RF Electrodes on SiO2/Si Substrates for High-Speed Electro-Optic Modulators",
  "type": "preprint",
  "updated_at": "2026-10-30T12:23:03Z",
  "url": "https://research.draconitic.com/paper/e2j9pkchk3wek",
  "venue": "arXiv",
  "versions": []
}