{
  "abstract": "Laser processing of silicon has long since become a standard method for wafer dicing, surface texturing, re-crystallization after ion implantation, as well as surface amorphization, to name a few examples. Here, we introduce a novel concept, the fabrication of vibrating microcavities in a commercial platform, Si wafers covered by a thick SiO2 layer, acting as a membrane. We demonstrate that by exposing our material system to single ultrashort laser pulses above the evaporation threshold of Si, a controlled delamination of the cover layer without fracture can be achieved, leading to the formation of a microcavity accompanied by a surface bulging up to 1.5 micrometer. The formation dynamics of the microcavities has been investigated by time-resolved optical probe techniques. Ultrafast pump-probe microscopy resolves the initial stages of substrate melting, the onset of layer expansion followed by relaxation. Real-time reflectivity measurements with nanosecond resolution resolve the long lived, highly complex oscillation process of the membrane, extending over tens of microseconds. The formed cavities can be re-excited at low fluence without damage or degradation, featuring vibrations at single frequencies with high Q factors. The frequencies can be tuned continuously from 8 MHz up to 19 MHz by adjusting the fabrication fluence. A simple classical model is found to well describe the behavior of the membranes. Our results pave the way for applications in micro- and nanooptics and acoustics, in great part due to the commercial availability of the Si-SiO2 platform and the simplicity of the fabrication method. An extension to the field of microelectromechanical system (MEMS) of this technology is proposed.",
  "abstract_shown": true,
  "affiliations": [],
  "article_type": null,
  "arxiv": "2611.07742",
  "author_total": 9,
  "authors": [
    {
      "name": "Belen Valiente"
    },
    {
      "name": "Gonzalo Gomez-Munoz"
    },
    {
      "name": "Mario Garcia-Lechuga"
    },
    {
      "name": "Irene Solana"
    },
    {
      "name": "Fernando Agulló-Rueda"
    },
    {
      "name": "David Grojo"
    },
    {
      "name": "Angel Rodriguez-Fernandez"
    },
    {
      "name": "Javier Solis"
    },
    {
      "name": "Jan Siegel"
    }
  ],
  "bibtex": "https://research.draconitic.com/paper/fcf65wrdjtx98.bib",
  "cited_by": 0,
  "doi": "10.48550/arxiv.2611.07742",
  "fulltext_url": null,
  "id": "fcf65wrdjtx98",
  "issns": [],
  "landing_url": "https://arxiv.org/abs/2611.07742",
  "language": null,
  "licence": "CC-BY-NC-ND-4.0",
  "licence_label": "CC BY-NC-ND 4.0",
  "licence_source": "article",
  "licence_url": "http://creativecommons.org/licenses/by-nc-nd/4.0/",
  "metadata_licence": "CC0-1.0",
  "native_subjects": [
    [
      "arxiv",
      "physics.app-ph"
    ],
    [
      "arxiv",
      "physics.optics"
    ]
  ],
  "openalex": null,
  "pdf_url": "https://arxiv.org/pdf/2611.07742",
  "pmcid": null,
  "pmid": null,
  "published": "2026-11-05",
  "publisher": null,
  "ris": "https://research.draconitic.com/paper/fcf65wrdjtx98.ris",
  "sources": [
    {
      "first_seen": "2026-11-06T18:21:30Z",
      "native_id": "2611.07742",
      "source": "arxiv",
      "url": "https://arxiv.org/abs/2611.07742"
    }
  ],
  "subjects": [
    {
      "field": "physics",
      "origin": "arxiv:physics.app-ph",
      "subfield": "applied-instrumentation"
    },
    {
      "field": "physics",
      "origin": "arxiv:physics.optics",
      "subfield": "optics-photonics"
    }
  ],
  "title": "Laser fabrication of vibrating microcavities on silicon: Formation dynamics and frequency tunability",
  "title_text": "Laser fabrication of vibrating microcavities on silicon: Formation dynamics and frequency tunability",
  "type": "preprint",
  "updated_at": "2026-11-08T18:20:56Z",
  "url": "https://research.draconitic.com/paper/fcf65wrdjtx98",
  "venue": "arXiv",
  "versions": []
}