{
  "abstract": "Atomic layer deposition (ALD) and atomic layer etching (ALE) are reported heterogeneously across experimental and simulation literature in materials science, hindering comparison and machine-actionable reuse. We present four domain-expert-reviewed JSON Schemas for ALD and ALE experimental and simulation processes. Curated with schema-miner and grounded in QUDT using schema-miner pro, the schemas structure materials, process conditions, configurations , and measured or predicted results. We compare their scope, structure, and semantic grounding, and demonstrate their use for schema-guided literature extraction and publication of structured records through ORKG templates.",
  "abstract_shown": true,
  "affiliations": [],
  "article_type": null,
  "arxiv": "2609.12139",
  "author_total": 8,
  "authors": [
    {
      "name": "Sameer Sadruddin"
    },
    {
      "name": "Eleni Poupaki"
    },
    {
      "name": "Alex Watkins"
    },
    {
      "name": "Bora Karasulu"
    },
    {
      "name": "Adriaan J. M. Mackus"
    },
    {
      "name": "Erwin Kessels"
    },
    {
      "name": "Sören Auer"
    },
    {
      "name": "Jennifer D'Souza"
    }
  ],
  "bibtex": "https://research.draconitic.com/paper/ffxdx8vryjbam.bib",
  "cited_by": 0,
  "doi": "10.48550/arxiv.2609.12139",
  "fulltext_url": null,
  "id": "ffxdx8vryjbam",
  "issns": [],
  "landing_url": "https://arxiv.org/abs/2609.12139",
  "language": null,
  "licence": "CC-BY-4.0",
  "licence_label": "CC BY 4.0",
  "licence_source": "article",
  "licence_url": "http://creativecommons.org/licenses/by/4.0/",
  "metadata_licence": "CC0-1.0",
  "native_subjects": [
    [
      "arxiv",
      "cond-mat.mtrl-sci"
    ],
    [
      "arxiv",
      "cs.AI"
    ],
    [
      "openalex",
      "2505|Machine Learning in Materials Science"
    ]
  ],
  "openalex": "W7213113305",
  "pdf_url": "https://arxiv.org/pdf/2609.12139",
  "pmcid": null,
  "pmid": null,
  "published": "2026-09-10",
  "publisher": null,
  "ris": "https://research.draconitic.com/paper/ffxdx8vryjbam.ris",
  "sources": [
    {
      "first_seen": "2026-10-30T12:21:07Z",
      "native_id": "2609.12139",
      "source": "arxiv",
      "url": "https://arxiv.org/abs/2609.12139"
    }
  ],
  "subjects": [
    {
      "field": "physics",
      "origin": "arxiv:cond-mat.mtrl-sci",
      "subfield": "condensed-matter"
    }
  ],
  "title": "Mined from Scientific Literature: Process Schemas for Atomic Layer Deposition and Etching in Materials Science",
  "title_text": "Mined from Scientific Literature: Process Schemas for Atomic Layer Deposition and Etching in Materials Science",
  "type": "preprint",
  "updated_at": "2026-10-30T12:21:07Z",
  "url": "https://research.draconitic.com/paper/ffxdx8vryjbam",
  "venue": "arXiv",
  "versions": []
}