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Peer-reviewedPublisher termsOptics Express

Data-driven surface figure analysis and process optimization for full-aperture continuous polishing based on processing data

  • Defeng Liao1
  • Qishan Hu2
  • Wei Wang2
  • Lin Zhu2
  • Ruiqing Xie1
  1. 1China Academy of Engineering Physics
  2. 2University of Electronic Science and Technology of China
Open at sourceDOICite

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Cite

BibTeXRIS
BibTeX
@article{liao2026datadriven,
  title = {{Data-driven surface figure analysis and process optimization for full-aperture continuous polishing based on processing data}},
  author = {Defeng Liao and Qishan Hu and Wei Wang and Lin Zhu and Ruiqing Xie},
  journal = {Optics Express},
  year = {2026},
  month = oct,
  doi = {10.1364/oe.613421},
  url = {https://opg.optica.org/abstract.cfm?URI=oe-34-21-38992},
}
RIS
TY  - JOUR
TI  - Data-driven surface figure analysis and process optimization for full-aperture continuous polishing based on processing data
AU  - Defeng Liao
AU  - Qishan Hu
AU  - Wei Wang
AU  - Lin Zhu
AU  - Ruiqing Xie
PY  - 2026
DA  - 2026/10/06
JO  - Optics Express
DO  - 10.1364/oe.613421
UR  - https://opg.optica.org/abstract.cfm?URI=oe-34-21-38992
SN  - 1094-4087
ER  -