Megapixel snapshot hyperspectral imaging with high resolution Fabry-Pérot color filter array.
- 1Department of Materials Science and Engineering, Southern University of Science and Technology, Shenzhen 518055, China.
- 2Department of Physics, Hong Kong Baptist University, Hong Kong 999077, China.
- 3School of Integrated Circuits, Harbin Institute of Technology, Shenzhen 518055, China.
Abstract
In the field of snapshot hyperspectral imaging, a long-pursuit objective is to develop advanced spectral information encoding elements with both high spatial resolution and large sensor size. Among various strategies, Fabry-Pérot (F-P) cavity color filter, which has both high transmittance and narrow-color filtering function, represents a promising platform. However, it is extremely challenging to make F-P color filters by using multi-layer deposition method. Here, we demonstrate that a commercial-sensor-compatible F-P cavity color filter array can be fabricated through the single-step grayscale electron beam lithography. In the proof-of-concept experiment, the silver-dielectric-silver F-P color filter array, which has spatial resolution of 5.2 µm × 5.2 µm and pixel number of 1.26 million, is successfully used to demonstrate the hyperspectral imaging function. As the diameter of the electron beam is at the level of tens of nanometers, the pixel size of the F-P cavity can be down to 3.45 µm × 3.45 µm and even further. The proposed method may have great potential in high-resolution snapshot hyperspectral imaging and related applications in optical inspection, remote sensing, biomedical imaging and so on.
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BibTeX
@article{chen2026megapixel,
title = {{Megapixel snapshot hyperspectral imaging with high resolution Fabry-Pérot color filter array.}},
author = {Yu Chen and Jiaming Huang and Zixian Hu and Rong Rong and Qichang Ma and Peiqi Zeng and Jiafei Chen and Hoilam Tam and Junhong Deng and Kingfai Li and Kokwai Cheah and Guixin Li},
journal = {National science review},
year = {2026},
month = aug,
doi = {10.1093/nsr/nwag526},
url = {https://europepmc.org/article/MED/42936247},
note = {CC BY},
}
RIS
TY - JOUR
TI - Megapixel snapshot hyperspectral imaging with high resolution Fabry-Pérot color filter array.
AU - Yu Chen
AU - Jiaming Huang
AU - Zixian Hu
AU - Rong Rong
AU - Qichang Ma
AU - Peiqi Zeng
AU - Jiafei Chen
AU - Hoilam Tam
AU - Junhong Deng
AU - Kingfai Li
AU - Kokwai Cheah
AU - Guixin Li
PY - 2026
DA - 2026/08/22
JO - National science review
DO - 10.1093/nsr/nwag526
UR - https://europepmc.org/article/MED/42936247
AB - In the field of snapshot hyperspectral imaging, a long-pursuit objective is to develop advanced spectral information encoding elements with both high spatial resolution and large sensor size. Among various strategies, Fabry-Pérot (F-P) cavity color filter, which has both high transmittance and narrow-color filtering function, represents a promising platform. However, it is extremely challenging to make F-P color filters by using multi-layer deposition method. Here, we demonstrate that a commercial-sensor-compatible F-P cavity color filter array can be fabricated through the single-step grayscale electron beam lithography. In the proof-of-concept experiment, the silver-dielectric-silver F-P color filter array, which has spatial resolution of 5.2 µm × 5.2 µm and pixel number of 1.26 million, is successfully used to demonstrate the hyperspectral imaging function. As the diameter of the electron beam is at the level of tens of nanometers, the pixel size of the F-P cavity can be down to 3.45 µm × 3.45 µm and even further. The proposed method may have great potential in high-resolution snapshot hyperspectral imaging and related applications in optical inspection, remote sensing, biomedical imaging and so on.
SN - 2095-5138
SN - 2053-714X
ER -