Peer-reviewedPublisher termsVacuum
Thermal modelling of a hot-wall CVD reactor: pressure and composition of the gas phase in the insulation felt matters
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BibTeX
@article{gallou2026thermal,
title = {{Thermal modelling of a hot-wall CVD reactor: pressure and composition of the gas phase in the insulation felt matters}},
author = {Yann Gallou and Cyril Hassant and Alexandre Potier and Didier Chaussende},
journal = {Vacuum},
year = {2026},
month = oct,
doi = {10.1016/j.vacuum.2025.114759},
url = {https://hal.science/hal-05836543v1},
}
RIS
TY - JOUR
TI - Thermal modelling of a hot-wall CVD reactor: pressure and composition of the gas phase in the insulation felt matters
AU - Yann Gallou
AU - Cyril Hassant
AU - Alexandre Potier
AU - Didier Chaussende
PY - 2026
DA - 2026/10/23
JO - Vacuum
DO - 10.1016/j.vacuum.2025.114759
UR - https://hal.science/hal-05836543v1
SN - 0042-207X
SN - 1879-2715
ER -