Peer-reviewedPublisher termsMaterials Science in Semiconductor Processing
N-doped Ge-rich GST film crystallization via C-AFM-generated electrical pulses
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BibTeX
@article{boujrouf2026ndoped,
title = {{N-doped Ge-rich GST film crystallization via C-AFM-generated electrical pulses}},
author = {Chaymaa Boujrouf and Marc Bocquet and Siham Hassak and Maxime Bertoglio and Loïc Patout and Yannick Le Friec and Alain Portavoce},
journal = {Materials Science in Semiconductor Processing},
year = {2026},
month = oct,
doi = {10.1016/j.mssp.2026.110542},
url = {https://hal.science/hal-05786461v1},
}
RIS
TY - JOUR
TI - N-doped Ge-rich GST film crystallization via C-AFM-generated electrical pulses
AU - Chaymaa Boujrouf
AU - Marc Bocquet
AU - Siham Hassak
AU - Maxime Bertoglio
AU - Loïc Patout
AU - Yannick Le Friec
AU - Alain Portavoce
PY - 2026
DA - 2026/10/08
JO - Materials Science in Semiconductor Processing
DO - 10.1016/j.mssp.2026.110542
UR - https://hal.science/hal-05786461v1
SN - 1369-8001
ER -