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Peer-reviewedCC BYPhotoacoustics

A novel microscale multilayer PZT MEMS cantilever for resonant photoacoustic gas sensing

  • Shan Lin1
  • Yongkang Gong2
  • Aron Michael1
  • Fupeng Wang2
  • Yinghang Jiao2
  • Gang-Ding Peng1
  1. 1School of Electrical Engineering and Telecommunications, University of New South Wales, Sydney, 2052, Australia
  2. 2Faculty of Information Science and Engineering, Engineering Research Center of Advanced Marine Physical Instruments and Equipment (Ministry of Education), Ocean University of China, Qingdao, 266100, China
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Cite

BibTeXRIS
BibTeX
@article{lin2026novel,
  title = {{A novel microscale multilayer PZT MEMS cantilever for resonant photoacoustic gas sensing}},
  author = {Shan Lin and Yongkang Gong and Aron Michael and Fupeng Wang and Yinghang Jiao and Gang-Ding Peng},
  journal = {Photoacoustics},
  year = {2026},
  month = oct,
  url = {https://europepmc.org/article/PMC/PMC13661209},
  note = {CC BY},
}
RIS
TY  - JOUR
TI  - A novel microscale multilayer PZT MEMS cantilever for resonant photoacoustic gas sensing
AU  - Shan Lin
AU  - Yongkang Gong
AU  - Aron Michael
AU  - Fupeng Wang
AU  - Yinghang Jiao
AU  - Gang-Ding Peng
PY  - 2026
DA  - 2026/10/01
JO  - Photoacoustics
UR  - https://europepmc.org/article/PMC/PMC13661209
SN  - 2213-5979
ER  -