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PreprintCC BYChemRxiv

Synthesis of Large-area Two-Dimension Metal-Organic Framework Films via Chemical Vapour Deposition

  • Jinzhi Zhang1,2,3
  • Runkun Li3,4,5
5 affiliations
  1. 1Insitute of Chemistry
  2. 2Chinese Academy of Sciences
  3. 3University of Chinese Academy of Science
  4. 4Faculty of Science
  5. 5University of Copenhagen
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Abstract

Synthesizing uniform and large-are two-dimensional (2D) metal-organic framework (MOF) films directly on substrates is highly desirable and important for MOF-based electronics, but it still remains great challenge. Here, a simple chemical vapour deposition (CVD) growth strategy with controllable-thickness and large-area capabilities has been developed to directly prepare them on substrates, in which 2,3,6,7,10,11-hexahydroxytriphenylene (HHTP) ligand films pre-deposited on substrates react with copper (II) acetylacetonate (Cu(acac) 2 ) vapor, resulting the structure transformation from small molecule thin film to Cu 3 (HHTP) 2 MOF films. The MOF films have high crystalline quality with uniform surface, large area (4 inches wafer) and controllable thickness (15 nm to 100 nm). And Replacing Cu(acac) 2 with nickel (II) acetylacetonate (Ni(acac) 2 ) and platinum (II) acetylacetonate (Pt(acac) 2 ) as metal ion source, the method can also be used to synthesize uniform Ni 3 (HHTP) 2 and Pt 3 (HHTP) 2 MOF films, suggesting the generic applicability of this method. When employed the Cu 3 (HHTP) 2 MOF films as an active material for optoelectronic devices, it simulates light-stimulated and synaptic memory properties, making it exhibit promising application in artificial biological synapse.

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Cite

BibTeXRIS
BibTeX
@misc{zhang2026synthesis,
  title = {{Synthesis of Large-area Two-Dimension Metal-Organic Framework Films via Chemical Vapour Deposition}},
  author = {Jinzhi Zhang and Runkun Li},
  howpublished = {ChemRxiv},
  year = {2026},
  month = oct,
  doi = {10.26434/chemrxiv.15005812/v1},
  url = {https://chemrxiv.org/doi/full/10.26434/chemrxiv.15005812/v1},
  note = {CC BY},
}
RIS
TY  - UNPB
TI  - Synthesis of Large-area Two-Dimension Metal-Organic Framework Films via Chemical Vapour Deposition
AU  - Jinzhi Zhang
AU  - Runkun Li
PY  - 2026
DA  - 2026/10/12
PB  - ChemRxiv
DO  - 10.26434/chemrxiv.15005812/v1
UR  - https://chemrxiv.org/doi/full/10.26434/chemrxiv.15005812/v1
AB  - Synthesizing uniform and large-are two-dimensional (2D) metal-organic framework (MOF) films directly on substrates is highly desirable and important for MOF-based electronics, but it still remains great challenge. Here, a simple chemical vapour deposition (CVD) growth strategy with controllable-thickness and large-area capabilities has been developed to directly prepare them on substrates, in which 2,3,6,7,10,11-hexahydroxytriphenylene (HHTP) ligand films pre-deposited on substrates react with copper (II) acetylacetonate (Cu(acac) 2 ) vapor, resulting the structure transformation from small molecule thin film to Cu 3 (HHTP) 2 MOF films. The MOF films have high crystalline quality with uniform surface, large area (4 inches wafer) and controllable thickness (15 nm to 100 nm). And Replacing Cu(acac) 2 with nickel (II) acetylacetonate (Ni(acac) 2 ) and platinum (II) acetylacetonate (Pt(acac) 2 ) as metal ion source, the method can also be used to synthesize uniform Ni 3 (HHTP) 2 and Pt 3 (HHTP) 2 MOF films, suggesting the generic applicability of this method. When employed the Cu 3 (HHTP) 2 MOF films as an active material for optoelectronic devices, it simulates light-stimulated and synaptic memory properties, making it exhibit promising application in artificial biological synapse.
ER  -