Inverse-Designed High-Q and Small-Mode-Volume Silicon Nitride Photonic Crystal Cavities for Second- and Third-Harmonic Generation
Abstract
SiN photonic crystal (PhC) cavities are promising platforms for nonlinear and quantum photonics because of their wide transparency window, CMOS compatibility, and negligible two-photon absorption. However, realizing high-Q/V cavities remains challenging because of the relatively low refractive index of SiN. Here, we employ inverse design to optimize a two-dimensional SiN PhC cavity and experimentally demonstrate a quality factor of approximately 80,000, the highest reported for a near-stoichiometric SiN 2D PhC cavity. Furthermore, both second- and third-harmonic generation are observed from the same cavity, providing experimental evidence of strong optical confinement and large Q/V. Our results establish inverse-designed SiN PhC cavities as a promising platform for nonlinear photonics and future heterogeneous integrated photonic devices.
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BibTeX
@misc{takiguchi2026inversedesigned,
title = {{Inverse-Designed High-Q and Small-Mode-Volume Silicon Nitride Photonic Crystal Cavities for Second- and Third-Harmonic Generation}},
author = {M. Takiguchi and P. Heidt and X. Z. Lim and J. Zöllner and S. Yanagimoto and K. Nakayama and T. Aihara and M. Ono and H. Sumikura and M. Notomi},
howpublished = {arXiv},
year = {2026},
month = oct,
doi = {10.48550/arxiv.2608.13261},
eprint = {2608.13261},
archivePrefix = {arXiv},
url = {https://arxiv.org/abs/2608.13261},
note = {CC BY 4.0},
}
RIS
TY - UNPB
TI - Inverse-Designed High-Q and Small-Mode-Volume Silicon Nitride Photonic Crystal Cavities for Second- and Third-Harmonic Generation
AU - M. Takiguchi
AU - P. Heidt
AU - X. Z. Lim
AU - J. Zöllner
AU - S. Yanagimoto
AU - K. Nakayama
AU - T. Aihara
AU - M. Ono
AU - H. Sumikura
AU - M. Notomi
PY - 2026
DA - 2026/10/27
PB - arXiv
DO - 10.48550/arxiv.2608.13261
UR - https://arxiv.org/abs/2608.13261
AB - SiN photonic crystal (PhC) cavities are promising platforms for nonlinear and quantum photonics because of their wide transparency window, CMOS compatibility, and negligible two-photon absorption. However, realizing high-Q/V cavities remains challenging because of the relatively low refractive index of SiN. Here, we employ inverse design to optimize a two-dimensional SiN PhC cavity and experimentally demonstrate a quality factor of approximately 80,000, the highest reported for a near-stoichiometric SiN 2D PhC cavity. Furthermore, both second- and third-harmonic generation are observed from the same cavity, providing experimental evidence of strong optical confinement and large Q/V. Our results establish inverse-designed SiN PhC cavities as a promising platform for nonlinear photonics and future heterogeneous integrated photonic devices.
ER -