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PreprintLicence not statedChemRxiv

On the role of surface oxidation for the nucleation delay in ALD of AlN

  • Pamburayi Mpofu1,2
  • Peggy Bagherzadeh Tabrizi1,2
  • Houyem Hafdi1,2
  • Jonas Lauridsen3
  • Oscar Alm3
  • Tommy Larsson3
  • Rosemary Jones4,5
  • Esko Kokkonen4
  • Joachim Schnadt4,5,6
  • Henrik Pedersen1,2
6 affiliations
  1. 1Department of Physics, Chemistry and Biology
  2. 2Linköping University
  3. 3Seco Tools AB
  4. 4MAX IV Laboratory, Lund University, Box 118, Lund, Sweden, 221 00
  5. 5Department of Physics, Lund University, Box 118, Lund, Sweden, 221 00
  6. 6NanoLund, Lund University, Box 118, Lund, Sweden, 221 00
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Cite

BibTeXRIS
BibTeX
@misc{mpofu2026role,
  title = {{On the role of surface oxidation for the nucleation delay in ALD of AlN}},
  author = {Pamburayi Mpofu and Peggy Bagherzadeh Tabrizi and Houyem Hafdi and Jonas Lauridsen and Oscar Alm and Tommy Larsson and Rosemary Jones and Esko Kokkonen and Joachim Schnadt and Henrik Pedersen},
  howpublished = {ChemRxiv},
  year = {2026},
  month = aug,
  doi = {10.26434/chemrxiv.15008071/v1},
  url = {https://chemrxiv.org/doi/full/10.26434/chemrxiv.15008071/v1},
}
RIS
TY  - UNPB
TI  - On the role of surface oxidation for the nucleation delay in ALD of AlN
AU  - Pamburayi Mpofu
AU  - Peggy Bagherzadeh Tabrizi
AU  - Houyem Hafdi
AU  - Jonas Lauridsen
AU  - Oscar Alm
AU  - Tommy Larsson
AU  - Rosemary Jones
AU  - Esko Kokkonen
AU  - Joachim Schnadt
AU  - Henrik Pedersen
PY  - 2026
DA  - 2026/08/31
PB  - ChemRxiv
DO  - 10.26434/chemrxiv.15008071/v1
UR  - https://chemrxiv.org/doi/full/10.26434/chemrxiv.15008071/v1
ER  -