PreprintarXiv licencearXiv
Study of Multilayer TiNx/Ti/TiNx Films Formed In Situ for High-Efficiency Integrated Microheaters
Abstract
A technology for the in situ formation of a three-layer TiNx/Ti/TiNx functional material within a single vacuum cycle is presented, together with the results of investigations of its structural and electrophysical properties. The maximum critical power density reached approximately 140 MW/cm2. Under continuous operation at 90% of the critical power, the structures remained operational for 24 h. The characteristics of microbridges without and with a protective SiOx layer were compared. The presence of the coating modifies the electrothermal operating regime of the structures and enables estimated temperatures of approximately 500-700 degrees Celsius to be reached.
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BibTeX
@misc{solovyev2026study,
title = {{Study of Multilayer TiNx/Ti/TiNx Films Formed In Situ for High-Efficiency Integrated Microheaters}},
author = {Oleg A. Solovyev and Zakhar S. Enbaev and Alexander R. Shevchenko and Aleksander M. Mumlyakov and Pavel A. Berezhnoy and Mikael O. Geodakyan and Mikhail V. Tsvetkov and Michael A. Tarkhov and Igor V. Trofimov},
howpublished = {arXiv},
year = {2026},
month = oct,
doi = {10.48550/arxiv.2610.37130},
eprint = {2610.37130},
archivePrefix = {arXiv},
url = {https://arxiv.org/abs/2610.37130},
}
RIS
TY - UNPB
TI - Study of Multilayer TiNx/Ti/TiNx Films Formed In Situ for High-Efficiency Integrated Microheaters
AU - Oleg A. Solovyev
AU - Zakhar S. Enbaev
AU - Alexander R. Shevchenko
AU - Aleksander M. Mumlyakov
AU - Pavel A. Berezhnoy
AU - Mikael O. Geodakyan
AU - Mikhail V. Tsvetkov
AU - Michael A. Tarkhov
AU - Igor V. Trofimov
PY - 2026
DA - 2026/10/27
PB - arXiv
DO - 10.48550/arxiv.2610.37130
UR - https://arxiv.org/abs/2610.37130
AB - A technology for the in situ formation of a three-layer TiN_x/Ti/TiN_x functional material within a single vacuum cycle is presented, together with the results of investigations of its structural and electrophysical properties. The maximum critical power density reached approximately 140 MW/cm^2. Under continuous operation at 90% of the critical power, the structures remained operational for 24 h. The characteristics of microbridges without and with a protective SiO_x layer were compared. The presence of the coating modifies the electrothermal operating regime of the structures and enables estimated temperatures of approximately 500-700 degrees Celsius to be reached.
ER -