Peer-reviewedLicence not statedOptics Express
A Fast and Accurate Source-Mask Optimization Flow Using a Unified Abbe-Hopkins Framework
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BibTeX
@article{wang2026fast,
title = {{A Fast and Accurate Source-Mask Optimization Flow Using a Unified Abbe-Hopkins Framework}},
author = {Ying Wang and Ming Zeng and Kaiye Liu and Yang Zhang and Shuting Cai and David Wei},
journal = {Optics Express},
year = {2026},
month = oct,
doi = {10.1364/oe.616234},
url = {https://opg.optica.org/oe/abstract.cfm?doi=10.1364/OE.616234},
}
RIS
TY - JOUR
TI - A Fast and Accurate Source-Mask Optimization Flow Using a Unified Abbe-Hopkins Framework
AU - Ying Wang
AU - Ming Zeng
AU - Kaiye Liu
AU - Yang Zhang
AU - Shuting Cai
AU - David Wei
PY - 2026
DA - 2026/10/26
JO - Optics Express
DO - 10.1364/oe.616234
UR - https://opg.optica.org/oe/abstract.cfm?doi=10.1364/OE.616234
SN - 1094-4087
ER -