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Peer-reviewedCC BY-NCScience Advances

CMOS multifunctional programmable metachip for terahertz-integrated sensing and communication

  • Ze Shen1
  • Kaizhe Guo1,2
  • Jingbo Wu1,3
  • Kebin Fan1,3
  • Haitao Jing2
  • Huanting Deng2
  • Xingliang Tian3
  • Biaobing Jin1,3
  • Xiaohu You1,2
  • Dixian Zhao1,2
  1. 1Purple Mountain Laboratories, Nanjing 211111, China.
  2. 2National Mobile Communication Research Laboratory, School of Information Science and Engineering, Southeast University, Nanjing 210096, China.
  3. 3Research Institute of Superconductor Electronics (RISE), School of Electronic Science and Engineering, Nanjing University, Nanjing 210023, China.
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Abstract

Metachips are formed by incorporating periodically arranged meta-atoms with on-chip circuits, enabling electromagnetic wave manipulation at the single-chip-tile level and holding great promise for terahertz applications. In this work, we present a complementary metal-oxide semiconductor (CMOS)-based terahertz-programmable metachip and demonstrate its proof of concept for terahertz-integrated sensing and communication (T-ISAC) with array scalability. Fabricated using an industry-standard 55-nanometer CMOS process, the proposed metachip realizes terahertz wave modulation at dual frequencies near 410 and 520 gigahertz in both reflection and transmission (transflection) modes. The metachip array supports multichannel terahertz communication by addressing distinct modulation signals to each chip tile. By harnessing the array scalability, the metachip array facilitates motion tracking of metallic objects while enabling the detection of the terahertz fingerprint material α-lactose against glucose. The proposed CMOS metachip represents a viable pathway toward integrated system-on-chip terahertz hardware solutions for scalable T-ISAC applications.

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Cite

BibTeXRIS
BibTeX
@article{shen2026cmos,
  title = {{CMOS multifunctional programmable metachip for terahertz-integrated sensing and communication}},
  author = {Ze Shen and Kaizhe Guo and Jingbo Wu and Kebin Fan and Haitao Jing and Huanting Deng and Xingliang Tian and Biaobing Jin and Xiaohu You and Dixian Zhao},
  journal = {Science Advances},
  year = {2026},
  month = oct,
  doi = {10.1126/sciadv.aeb5047},
  url = {https://www.science.org/doi/10.1126/sciadv.aeb5047},
  note = {CC BY-NC},
}
RIS
TY  - JOUR
TI  - CMOS multifunctional programmable metachip for terahertz-integrated sensing and communication
AU  - Ze Shen
AU  - Kaizhe Guo
AU  - Jingbo Wu
AU  - Kebin Fan
AU  - Haitao Jing
AU  - Huanting Deng
AU  - Xingliang Tian
AU  - Biaobing Jin
AU  - Xiaohu You
AU  - Dixian Zhao
PY  - 2026
DA  - 2026/10/02
JO  - Science Advances
DO  - 10.1126/sciadv.aeb5047
UR  - https://www.science.org/doi/10.1126/sciadv.aeb5047
AB  - Metachips are formed by incorporating periodically arranged meta-atoms with on-chip circuits, enabling electromagnetic wave manipulation at the single-chip-tile level and holding great promise for terahertz applications. In this work, we present a complementary metal-oxide semiconductor (CMOS)-based terahertz-programmable metachip and demonstrate its proof of concept for terahertz-integrated sensing and communication (T-ISAC) with array scalability. Fabricated using an industry-standard 55-nanometer CMOS process, the proposed metachip realizes terahertz wave modulation at dual frequencies near 410 and 520 gigahertz in both reflection and transmission (transflection) modes. The metachip array supports multichannel terahertz communication by addressing distinct modulation signals to each chip tile. By harnessing the array scalability, the metachip array facilitates motion tracking of metallic objects while enabling the detection of the terahertz fingerprint material α-lactose against glucose. The proposed CMOS metachip represents a viable pathway toward integrated system-on-chip terahertz hardware solutions for scalable T-ISAC applications.
SN  - 2375-2548
ER  -