PreprintarXiv licencearXiv
AAA rational approximation for scatterometry of nanoscale gratings
Abstract
We investigate the applicability of AAA rational approximation to scatterometry-related response functions of nanoscale gratings. A silicon line grating with material dispersion is considered. We compare the convergence of AAA rational approximation with that of cubic spline interpolation as the number of frequency samples is increased. The results demonstrate the potential of rational approximation, consistent with the pole structure of the considered response function arising from resonance effects of the grating.
Related
- A Unified Rational-Function Approximation for Square-Well, Square-Shoulder, and Nonadditive Hard-Sphere Mixtures
- Quantum photonic treatment of nano-polarization in diffraction gratings
- Multiple structured laser arrays via the superimposition of fork gratings in Nd:YAG
- Thermo-optically tunable Bragg soliton-effect compression in on-chip silicon nitride gratings
- Physical-Prior-Guided Spectral Token Network for Vector Bending Demodulation of Multicore Fiber Bragg Gratings
BibTeX
@misc{leibl2026rational,
title = {{AAA rational approximation for scatterometry of nanoscale gratings}},
author = {Livius Leibl and Viktoriia Sytenko and Rana Demircioglu and Leonid Beliaev and Felix Binkowski},
howpublished = {arXiv},
year = {2026},
month = aug,
doi = {10.48550/arxiv.2608.28185},
eprint = {2608.28185},
archivePrefix = {arXiv},
url = {https://arxiv.org/abs/2608.28185},
}
RIS
TY - UNPB
TI - AAA rational approximation for scatterometry of nanoscale gratings
AU - Livius Leibl
AU - Viktoriia Sytenko
AU - Rana Demircioglu
AU - Leonid Beliaev
AU - Felix Binkowski
PY - 2026
DA - 2026/08/28
PB - arXiv
DO - 10.48550/arxiv.2608.28185
UR - https://arxiv.org/abs/2608.28185
AB - We investigate the applicability of AAA rational approximation to scatterometry-related response functions of nanoscale gratings. A silicon line grating with material dispersion is considered. We compare the convergence of AAA rational approximation with that of cubic spline interpolation as the number of frequency samples is increased. The results demonstrate the potential of rational approximation, consistent with the pole structure of the considered response function arising from resonance effects of the grating.
ER -