Post-fabrication trimming of a 1024-pixel, single-photon counting, Microwave Kinetic Inductance Detector array with a pixel pitch of 150 micron
Abstract
Microwave Kinetic Inductance Detectors are superconducting resonators capable of single-photon counting with energy resolving capability at visible and near-infrared wavelengths. Their zero read noise, extremely low dark counts, and compatibility with frequency-division multiplexing make them well suited for large imaging arrays. The detector yield of these arrays is often limited by the fabrication-induced frequency scatter leading to resonator collisions. We find that the tight packing of the pixels can add significant frequency scatter as well. We developed a post-fabrication correction method that is suitable for tightly packed arrays with a pixel pitch of 150 μm. We demonstrate this method on a 1024-pixel array multiplexed on a single octave of readout bandwidth and show a reduction in frequency scatter from 1.1× 10−2 to 3.5× 10−4 and an increase in yield from 76% to 94%.
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BibTeX
@misc{rasvinke2026postfabrication,
title = {{Post-fabrication trimming of a 1024-pixel, single-photon counting, Microwave Kinetic Inductance Detector array with a pixel pitch of 150 micron}},
author = {Wilbert Ras-Vinke and Hessel Schulte and David J. Thoen and Kevin Kouwenhoven and Steven A. H. de Rooij and Tonny A. H. M. Coppens and Jochem J. A. Baselmans and Pieter J. de Visser},
howpublished = {arXiv},
year = {2026},
month = sep,
doi = {10.48550/arxiv.2609.10146},
eprint = {2609.10146},
archivePrefix = {arXiv},
url = {https://arxiv.org/abs/2609.10146},
note = {CC BY 4.0},
}
RIS
TY - UNPB
TI - Post-fabrication trimming of a 1024-pixel, single-photon counting, Microwave Kinetic Inductance Detector array with a pixel pitch of 150 micron
AU - Wilbert Ras-Vinke
AU - Hessel Schulte
AU - David J. Thoen
AU - Kevin Kouwenhoven
AU - Steven A. H. de Rooij
AU - Tonny A. H. M. Coppens
AU - Jochem J. A. Baselmans
AU - Pieter J. de Visser
PY - 2026
DA - 2026/09/09
PB - arXiv
DO - 10.48550/arxiv.2609.10146
UR - https://arxiv.org/abs/2609.10146
AB - Microwave Kinetic Inductance Detectors are superconducting resonators capable of single-photon counting with energy resolving capability at visible and near-infrared wavelengths. Their zero read noise, extremely low dark counts, and compatibility with frequency-division multiplexing make them well suited for large imaging arrays. The detector yield of these arrays is often limited by the fabrication-induced frequency scatter leading to resonator collisions. We find that the tight packing of the pixels can add significant frequency scatter as well. We developed a post-fabrication correction method that is suitable for tightly packed arrays with a pixel pitch of 150 μm. We demonstrate this method on a 1024-pixel array multiplexed on a single octave of readout bandwidth and show a reduction in frequency scatter from 1.1× 10^−2 to 3.5× 10^−4 and an increase in yield from 76% to 94%.
ER -