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PreprintCC BY-SA 4.0arXiv

Determination of van der Waals thin film thickness via characteristic X-ray photon yield

Abstract

Characteristic X ray generation is essential for producing X ray sources and for investigating light matter interactions. Here, we demonstrate that characteristic X ray generation can also be employed to determine the thickness of van der Waals thin films in a non destructive manner. Specifically, we establish a sixth order polynomial model that relates film thickness to the characteristic X ray yield. The model can both predict the X ray yield of graphite films at arbitrary thicknesses and infer the film thickness from a corresponding characteristic X ray yield. We validate the model by comparing its predicted X ray yields for graphite films with those obtained from Monte Carlo simulations. Additionally, we experimentally validated the reliability and feasibility of the proposed method for extracting graphite film thickness via X ray photon yield characterization. Our results provide a non destructive approach for determining the thickness of van der Waals thin films.

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BibTeX
@misc{luo2026determination,
  title = {{Determination of van der Waals thin film thickness via characteristic X-ray photon yield}},
  author = {Guoshun Luo and Shichao Zhao and Xinyu Liu and Suguo Chen and Yue Wang and Ping Zhang and Zhigang Lu and Shaomeng Wang and Sunchao Huang and Yubin Gong},
  howpublished = {arXiv},
  year = {2026},
  month = oct,
  doi = {10.48550/arxiv.2610.01309},
  eprint = {2610.01309},
  archivePrefix = {arXiv},
  url = {https://arxiv.org/abs/2610.01309},
  note = {CC BY-SA 4.0},
}
RIS
TY  - UNPB
TI  - Determination of van der Waals thin film thickness via characteristic X-ray photon yield
AU  - Guoshun Luo
AU  - Shichao Zhao
AU  - Xinyu Liu
AU  - Suguo Chen
AU  - Yue Wang
AU  - Ping Zhang
AU  - Zhigang Lu
AU  - Shaomeng Wang
AU  - Sunchao Huang
AU  - Yubin Gong
PY  - 2026
DA  - 2026/10/01
PB  - arXiv
DO  - 10.48550/arxiv.2610.01309
UR  - https://arxiv.org/abs/2610.01309
AB  - Characteristic X ray generation is essential for producing X ray sources and for investigating light matter interactions. Here, we demonstrate that characteristic X ray generation can also be employed to determine the thickness of van der Waals thin films in a non destructive manner. Specifically, we establish a sixth order polynomial model that relates film thickness to the characteristic X ray yield. The model can both predict the X ray yield of graphite films at arbitrary thicknesses and infer the film thickness from a corresponding characteristic X ray yield. We validate the model by comparing its predicted X ray yields for graphite films with those obtained from Monte Carlo simulations. Additionally, we experimentally validated the reliability and feasibility of the proposed method for extracting graphite film thickness via X ray photon yield characterization. Our results provide a non destructive approach for determining the thickness of van der Waals thin films.
ER  -