Peer-reviewedLicence not statedOptics Express
Diffractive optical-digital neural networks for robust EUV mask phase-defect characterization and classification
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BibTeX
@article{guan2026diffractive,
title = {{Diffractive optical-digital neural networks for robust EUV mask phase-defect characterization and classification}},
author = {Yunsong Guan and Sikun Li and Bowen Sun and Jibin He and Jianlang Li},
journal = {Optics Express},
year = {2026},
month = nov,
doi = {10.1364/oe.612390},
url = {https://opg.optica.org/oe/abstract.cfm?doi=10.1364/OE.612390},
}
RIS
TY - JOUR
TI - Diffractive optical-digital neural networks for robust EUV mask phase-defect characterization and classification
AU - Yunsong Guan
AU - Sikun Li
AU - Bowen Sun
AU - Jibin He
AU - Jianlang Li
PY - 2026
DA - 2026/11/08
JO - Optics Express
DO - 10.1364/oe.612390
UR - https://opg.optica.org/oe/abstract.cfm?doi=10.1364/OE.612390
SN - 1094-4087
ER -