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Peer-reviewedLicence not statedOptics Express

Diffractive optical-digital neural networks for robust EUV mask phase-defect characterization and classification

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BibTeX
@article{guan2026diffractive,
  title = {{Diffractive optical-digital neural networks for robust EUV mask phase-defect characterization and classification}},
  author = {Yunsong Guan and Sikun Li and Bowen Sun and Jibin He and Jianlang Li},
  journal = {Optics Express},
  year = {2026},
  month = nov,
  doi = {10.1364/oe.612390},
  url = {https://opg.optica.org/oe/abstract.cfm?doi=10.1364/OE.612390},
}
RIS
TY  - JOUR
TI  - Diffractive optical-digital neural networks for robust EUV mask phase-defect characterization and classification
AU  - Yunsong Guan
AU  - Sikun Li
AU  - Bowen Sun
AU  - Jibin He
AU  - Jianlang Li
PY  - 2026
DA  - 2026/11/08
JO  - Optics Express
DO  - 10.1364/oe.612390
UR  - https://opg.optica.org/oe/abstract.cfm?doi=10.1364/OE.612390
SN  - 1094-4087
ER  -