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Peer-reviewedPublisher termsOptics Express

Wafer alignment measurement using vortex beam interferometry and double diffraction by the same grating

  • Lijun Zhou1
  • Li Chen2
  • Zhongliang Li2
  • Peng Feng2
  • Kaining Zhang1
  • Jinming Gao1
  • Lan Wu1
  • Xiangzhao Wang1,2
  1. 1ZJU-Hangzhou Global Scientific and Technological Innovation Center
  2. 2Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences
Open at sourceDOICite

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Cite

BibTeXRIS
BibTeX
@article{zhou2026wafer,
  title = {{Wafer alignment measurement using vortex beam interferometry and double diffraction by the same grating}},
  author = {Lijun Zhou and Li Chen and Zhongliang Li and Peng Feng and Kaining Zhang and Jinming Gao and Lan Wu and Xiangzhao Wang},
  journal = {Optics Express},
  year = {2026},
  month = oct,
  doi = {10.1364/oe.612726},
  url = {https://opg.optica.org/abstract.cfm?URI=oe-34-21-38785},
}
RIS
TY  - JOUR
TI  - Wafer alignment measurement using vortex beam interferometry and double diffraction by the same grating
AU  - Lijun Zhou
AU  - Li Chen
AU  - Zhongliang Li
AU  - Peng Feng
AU  - Kaining Zhang
AU  - Jinming Gao
AU  - Lan Wu
AU  - Xiangzhao Wang
PY  - 2026
DA  - 2026/10/05
JO  - Optics Express
DO  - 10.1364/oe.612726
UR  - https://opg.optica.org/abstract.cfm?URI=oe-34-21-38785
SN  - 1094-4087
ER  -