PreprintCC BY 4.0arXiv
Mined from Scientific Literature: Process Schemas for Atomic Layer Deposition and Etching in Materials Science
Abstract
Atomic layer deposition (ALD) and atomic layer etching (ALE) are reported heterogeneously across experimental and simulation literature in materials science, hindering comparison and machine-actionable reuse. We present four domain-expert-reviewed JSON Schemas for ALD and ALE experimental and simulation processes. Curated with schema-miner and grounded in QUDT using schema-miner pro, the schemas structure materials, process conditions, configurations , and measured or predicted results. We compare their scope, structure, and semantic grounding, and demonstrate their use for schema-guided literature extraction and publication of structured records through ORKG templates.
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BibTeX
@misc{sadruddin2026mined,
title = {{Mined from Scientific Literature: Process Schemas for Atomic Layer Deposition and Etching in Materials Science}},
author = {Sameer Sadruddin and Eleni Poupaki and Alex Watkins and Bora Karasulu and Adriaan J. M. Mackus and Erwin Kessels and Sören Auer and Jennifer D'Souza},
howpublished = {arXiv},
year = {2026},
month = sep,
doi = {10.48550/arxiv.2609.12139},
eprint = {2609.12139},
archivePrefix = {arXiv},
url = {https://arxiv.org/abs/2609.12139},
note = {CC BY 4.0},
}
RIS
TY - UNPB
TI - Mined from Scientific Literature: Process Schemas for Atomic Layer Deposition and Etching in Materials Science
AU - Sameer Sadruddin
AU - Eleni Poupaki
AU - Alex Watkins
AU - Bora Karasulu
AU - Adriaan J. M. Mackus
AU - Erwin Kessels
AU - Sören Auer
AU - Jennifer D'Souza
PY - 2026
DA - 2026/09/10
PB - arXiv
DO - 10.48550/arxiv.2609.12139
UR - https://arxiv.org/abs/2609.12139
AB - Atomic layer deposition (ALD) and atomic layer etching (ALE) are reported heterogeneously across experimental and simulation literature in materials science, hindering comparison and machine-actionable reuse. We present four domain-expert-reviewed JSON Schemas for ALD and ALE experimental and simulation processes. Curated with schema-miner and grounded in QUDT using schema-miner pro, the schemas structure materials, process conditions, configurations , and measured or predicted results. We compare their scope, structure, and semantic grounding, and demonstrate their use for schema-guided literature extraction and publication of structured records through ORKG templates.
ER -