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Peer-reviewedCC BYMicromachines

Reliability Analysis of Semiconductor Material Processing for Advanced Integrated Circuit Chip Manufacturing

  • Yihan Zhang1
  • Shan Jiang2
  • Daqiang Zhang3
  1. 1School of Electrical and Electronic Engineering, , Singapore 639798, Singapore;
  2. 2School of Materials Science and Engineering, , Singapore 639798, Singapore;
  3. 3School of Software Engineering, , Shanghai 201804, China
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Cite

BibTeXRIS
BibTeX
@article{zhang2026reliability,
  title = {{Reliability Analysis of Semiconductor Material Processing for Advanced Integrated Circuit Chip Manufacturing}},
  author = {Yihan Zhang and Shan Jiang and Daqiang Zhang},
  journal = {Micromachines},
  year = {2026},
  month = sep,
  url = {https://europepmc.org/article/PMC/PMC13707805},
  note = {CC BY},
}
RIS
TY  - JOUR
TI  - Reliability Analysis of Semiconductor Material Processing for Advanced Integrated Circuit Chip Manufacturing
AU  - Yihan Zhang
AU  - Shan Jiang
AU  - Daqiang Zhang
PY  - 2026
DA  - 2026/09/28
JO  - Micromachines
UR  - https://europepmc.org/article/PMC/PMC13707805
SN  - 2072-666X
ER  -