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Peer-reviewedLicence not statedOptics Express

Transfer-function-guided suppression of grinding-induced mid-spatial-frequency errors on single-crystal silicon

  • Hanwei Xu
  • Yifan Dai
  • Chaoliang Guan
  • Cheng HUANG
  • Chunyang Du
Open at sourceDOICite

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Cite

BibTeXRIS
BibTeX
@article{xu2026transferfunctionguided,
  title = {{Transfer-function-guided suppression of grinding-induced mid-spatial-frequency errors on single-crystal silicon}},
  author = {Hanwei Xu and Yifan Dai and Chaoliang Guan and Cheng HUANG and Chunyang Du},
  journal = {Optics Express},
  year = {2026},
  month = nov,
  doi = {10.1364/oe.618010},
  url = {https://opg.optica.org/oe/abstract.cfm?doi=10.1364/OE.618010},
}
RIS
TY  - JOUR
TI  - Transfer-function-guided suppression of grinding-induced mid-spatial-frequency errors on single-crystal silicon
AU  - Hanwei Xu
AU  - Yifan Dai
AU  - Chaoliang Guan
AU  - Cheng HUANG
AU  - Chunyang Du
PY  - 2026
DA  - 2026/11/04
JO  - Optics Express
DO  - 10.1364/oe.618010
UR  - https://opg.optica.org/oe/abstract.cfm?doi=10.1364/OE.618010
SN  - 1094-4087
ER  -