A review of ring-type rotational MEMS traveling-wave ultrasonic micromotors: design, detection, control, and application validation.
6 affiliations
- 1Institute of AI for Industries, Chinese Academy of Sciences, Nanjing, China.
- 2Jiangsu Key Laboratory of AI for Industries, Nanjing, China.
- 3Institute of Computing Technology, Chinese Academy of Sciences, Beijing, China.
- 4School of Mechanical Engineering, Nanjing University of Science and Technology, Nanjing, China. [email protected].
- 5Institute of AI for Industries, Chinese Academy of Sciences, Nanjing, China. [email protected].
- 6Jiangsu Key Laboratory of AI for Industries, Nanjing, China. [email protected].
Abstract
The ring-type rotational microelectromechanical systems (MEMS) traveling-wave ultrasonic micromotor has emerged as an important candidate for micro- and small-scale precision rotary actuation because of its thin-film structure, low driving voltage, less electromagnetic interference, and strong potential for system-level integration. In recent years, continuous advances in MEMS wafer processing, lead zirconate titanate (PZT) thin-film deposition and etching, and multi-layer interconnect packaging have driven substantial progress in micro-stator design, output performance, online sensing, motion control, and application validation of ring-type rotational MEMS traveling-wave ultrasonic micromotors (R-MTWUMs). Centered on the framework of design, detection, control, and application, this review systematically summarizes the development of R-MTWUMs. It first outlines their operating principles and representative fabrication processes, and then critically reviews the evolution of micro-stator configurations from substrate supported structures to nodal circle anchored and flexibly supported structures, and further to stator teeth and ball-amplified structures. Key performance metrics, including quality factor, driving voltage, torque, and rotation speed, are comparatively analyzed. On this basis, the review further summarizes the main detection methods used for R-MTWUMs, discusses recent progress in angular position sensing, driving and control, feedback electrode-based mode monitoring, and closed-loop control, and assesses their application potential through the application validation. Finally, this review summarizes major development trends, discusses the remaining challenges in fabrication, mechanism, evaluation, on-chip sensing, and closed-loop control, and outlines future research directions to accelerate the transition of R-MTWUMs from laboratory prototypes to practical engineering systems.
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BibTeX
@article{xie2026review,
title = {{A review of ring-type rotational MEMS traveling-wave ultrasonic micromotors: design, detection, control, and application validation.}},
author = {Jinxuan Xie and Chu Wang and Longchao Dong and Zhibo Zhang and Hao Zhou and Yinlong Zhang and Yong Sun and Yiming Sun and Tong Zhou and Chunhe Song},
journal = {Microsystems \& nanoengineering},
year = {2026},
month = oct,
doi = {10.1038/s41378-026-01479-8},
url = {https://europepmc.org/article/MED/42957671},
note = {CC BY-NC-ND},
}
RIS
TY - JOUR
TI - A review of ring-type rotational MEMS traveling-wave ultrasonic micromotors: design, detection, control, and application validation.
AU - Jinxuan Xie
AU - Chu Wang
AU - Longchao Dong
AU - Zhibo Zhang
AU - Hao Zhou
AU - Yinlong Zhang
AU - Yong Sun
AU - Yiming Sun
AU - Tong Zhou
AU - Chunhe Song
PY - 2026
DA - 2026/10/28
JO - Microsystems & nanoengineering
DO - 10.1038/s41378-026-01479-8
UR - https://europepmc.org/article/MED/42957671
AB - The ring-type rotational microelectromechanical systems (MEMS) traveling-wave ultrasonic micromotor has emerged as an important candidate for micro- and small-scale precision rotary actuation because of its thin-film structure, low driving voltage, less electromagnetic interference, and strong potential for system-level integration. In recent years, continuous advances in MEMS wafer processing, lead zirconate titanate (PZT) thin-film deposition and etching, and multi-layer interconnect packaging have driven substantial progress in micro-stator design, output performance, online sensing, motion control, and application validation of ring-type rotational MEMS traveling-wave ultrasonic micromotors (R-MTWUMs). Centered on the framework of design, detection, control, and application, this review systematically summarizes the development of R-MTWUMs. It first outlines their operating principles and representative fabrication processes, and then critically reviews the evolution of micro-stator configurations from substrate supported structures to nodal circle anchored and flexibly supported structures, and further to stator teeth and ball-amplified structures. Key performance metrics, including quality factor, driving voltage, torque, and rotation speed, are comparatively analyzed. On this basis, the review further summarizes the main detection methods used for R-MTWUMs, discusses recent progress in angular position sensing, driving and control, feedback electrode-based mode monitoring, and closed-loop control, and assesses their application potential through the application validation. Finally, this review summarizes major development trends, discusses the remaining challenges in fabrication, mechanism, evaluation, on-chip sensing, and closed-loop control, and outlines future research directions to accelerate the transition of R-MTWUMs from laboratory prototypes to practical engineering systems.
SN - 2096-1030
SN - 2055-7434
ER -