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PreprintCC BY 4.0arXiv

Role of Local Structural Variation in X-ray Photoelectron Spectrum of Silicon Oxide Interfaces

  • Mikael Santonen
  • Sari Granroth
  • Johanna Laaksonen
  • Pekka Laukkanen
  • Johannes Niskanen
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Abstract

We show that the broad X-ray photoelectron lines of silicon oxide on silicon arise from a continuous statistical distribution of core-level binding energies. Statistical simulations spanning compositions from Si to SiO2 reproduce the full extent of this broadening, reaching 5 eV for SiO1.0 , in quantitative agreement with 0.23 nm layer-resolved spectra reconstructed from Ar+ sputtering data. This continuous distribution blurs distinct spectral fingerprints of local structural motifs, thereby challenging conventional chemical state assignment in oxide X-ray photoelectron spectra.

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Cite

BibTeXRIS
BibTeX
@misc{santonen2026role,
  title = {{Role of Local Structural Variation in X-ray Photoelectron Spectrum of Silicon Oxide Interfaces}},
  author = {Mikael Santonen and Sari Granroth and Johanna Laaksonen and Pekka Laukkanen and Johannes Niskanen},
  howpublished = {arXiv},
  year = {2026},
  month = oct,
  doi = {10.48550/arxiv.2606.18769},
  eprint = {2606.18769},
  archivePrefix = {arXiv},
  url = {https://arxiv.org/abs/2606.18769},
  note = {CC BY 4.0},
}
RIS
TY  - UNPB
TI  - Role of Local Structural Variation in X-ray Photoelectron Spectrum of Silicon Oxide Interfaces
AU  - Mikael Santonen
AU  - Sari Granroth
AU  - Johanna Laaksonen
AU  - Pekka Laukkanen
AU  - Johannes Niskanen
PY  - 2026
DA  - 2026/10/16
PB  - arXiv
DO  - 10.48550/arxiv.2606.18769
UR  - https://arxiv.org/abs/2606.18769
AB  - We show that the broad X-ray photoelectron lines of silicon oxide on silicon arise from a continuous statistical distribution of core-level binding energies. Statistical simulations spanning compositions from Si to SiO_2 reproduce the full extent of this broadening, reaching 5 eV for SiO_1.0 , in quantitative agreement with 0.23 nm layer-resolved spectra reconstructed from Ar^+ sputtering data. This continuous distribution blurs distinct spectral fingerprints of local structural motifs, thereby challenging conventional chemical state assignment in oxide X-ray photoelectron spectra.
ER  -