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Peer-reviewedLicence not statedNanomaterials

Defect studies in thin-film SiO\textsubscript2 of a metal-oxide-silicon capacitor using drift-assisted positron annihilation lifetime spectroscopy

  • Ricardo Helm
  • Werner Egger
  • Catherine Corbel
  • Peter Sperr
  • Maik Butterling
  • Andreas Wagner
  • Maciej Oskar Liedke
  • Johannes Mitteneder
  • Michael Mayerhofer
  • Kangho Lee
  • Georg S. Duesberg
  • Günther Dollinger
1 more authors
  • Marcel Dickmann
Open at sourceDOICite

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Cite

BibTeXRIS
BibTeX
@article{helm2026defect,
  title = {{Defect studies in thin-film SiO\textsubscript2 of a metal-oxide-silicon capacitor using drift-assisted positron annihilation lifetime spectroscopy}},
  author = {Ricardo Helm and Werner Egger and Catherine Corbel and Peter Sperr and Maik Butterling and Andreas Wagner and Maciej Oskar Liedke and Johannes Mitteneder and Michael Mayerhofer and Kangho Lee and Georg S. Duesberg and Günther Dollinger and Marcel Dickmann},
  journal = {Nanomaterials},
  year = {2026},
  month = sep,
  doi = {10.3390/nano15151142},
  url = {https://hal.science/hal-05771168v1},
}
RIS
TY  - JOUR
TI  - Defect studies in thin-film SiO\textsubscript2 of a metal-oxide-silicon capacitor using drift-assisted positron annihilation lifetime spectroscopy
AU  - Ricardo Helm
AU  - Werner Egger
AU  - Catherine Corbel
AU  - Peter Sperr
AU  - Maik Butterling
AU  - Andreas Wagner
AU  - Maciej Oskar Liedke
AU  - Johannes Mitteneder
AU  - Michael Mayerhofer
AU  - Kangho Lee
AU  - Georg S. Duesberg
AU  - Günther Dollinger
AU  - Marcel Dickmann
PY  - 2026
DA  - 2026/09/30
JO  - Nanomaterials
DO  - 10.3390/nano15151142
UR  - https://hal.science/hal-05771168v1
SN  - 2079-4991
SN  - 2079-4991
ER  -