Three-dimensional dopant distribution from a single, out-of-focus spectroscopic image
Abstract
Increasing miniaturization of nanoscale devices makes determining the three-dimensional distribution of dopants increasingly important. In out-of-focus spectroscopic scanning transmission electron microscopy images, we show that dopant atoms appear as disks with radii relating to dopant depth, allowing the three-dimensional distribution of dopants to be determined from simple geometric analysis of a single out-of-focus image. Through numerical experiments on Si-doped graphene we validate statistical detection and Bayesian inference methods to quantify confidence and uncertainties while making the analysis more robust at lower dose. We present proof-of-concept experimental data from an Fe-doped spinel, retrieving dopant depth to within around 2 nanometres.
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BibTeX
@misc{deimetry2026threedimensional,
title = {{Three-dimensional dopant distribution from a single, out-of-focus spectroscopic image}},
author = {Michael Deimetry and Timothy Petersen and Matthew Weyland and Scott Findlay},
howpublished = {arXiv},
year = {2026},
month = oct,
doi = {10.48550/arxiv.2610.11053},
eprint = {2610.11053},
archivePrefix = {arXiv},
url = {https://arxiv.org/abs/2610.11053},
}
RIS
TY - UNPB
TI - Three-dimensional dopant distribution from a single, out-of-focus spectroscopic image
AU - Michael Deimetry
AU - Timothy Petersen
AU - Matthew Weyland
AU - Scott Findlay
PY - 2026
DA - 2026/10/08
PB - arXiv
DO - 10.48550/arxiv.2610.11053
UR - https://arxiv.org/abs/2610.11053
AB - Increasing miniaturization of nanoscale devices makes determining the three-dimensional distribution of dopants increasingly important. In out-of-focus spectroscopic scanning transmission electron microscopy images, we show that dopant atoms appear as disks with radii relating to dopant depth, allowing the three-dimensional distribution of dopants to be determined from simple geometric analysis of a single out-of-focus image. Through numerical experiments on Si-doped graphene we validate statistical detection and Bayesian inference methods to quantify confidence and uncertainties while making the analysis more robust at lower dose. We present proof-of-concept experimental data from an Fe-doped spinel, retrieving dopant depth to within around 2 nanometres.
ER -