Enhanced nanometer-scale linewidth metrology using dark-field through-focus scanning optical microscopy

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BibTeX

@article{kim2026enhanced,
  title = {{Enhanced nanometer-scale linewidth metrology using dark-field through-focus scanning optical microscopy}},
  author = {Se Jeong Kim and Ji Yong Joo and Jun Ho Lee and Oh-hyung Kwon},
  journal = {Optics Express},
  year = {2026},
  month = oct,
  doi = {10.1364/oe.612996},
  url = {https://opg.optica.org/abstract.cfm?URI=oe-34-21-40030},
}

RIS

TY  - JOUR
TI  - Enhanced nanometer-scale linewidth metrology using dark-field through-focus scanning optical microscopy
AU  - Se Jeong Kim
AU  - Ji Yong Joo
AU  - Jun Ho Lee
AU  - Oh-hyung Kwon
PY  - 2026
DA  - 2026/10/13
JO  - Optics Express
DO  - 10.1364/oe.612996
UR  - https://opg.optica.org/abstract.cfm?URI=oe-34-21-40030
SN  - 1094-4087
ER  -

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