Peer-reviewedCC BYNanomaterials (Basel, Switzerland)24 Sep 2026

Thickness Engineering in HfO2-Based Ferroelectrics: A Critical Review of Phase, Switching, Reliability, and Device Trade-Offs

Yuwei Cai¹
Yao Li¹
Zhongjian Gao¹
Qingzhu Zhang²
Zhaohao Zhang²
Wenxiu Dong¹
Wen Ren¹
Ruige Zhang¹

¹College of Mechanical and Electrical Engineering, Sanming University, Sanming 365004, China
²School of Integrated Circuits, University of Chinese Academy of Sciences, Beijing 100029, China

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Cite

BibTeX

@article{cai2026thickness,
  title = {{Thickness Engineering in HfO2-Based Ferroelectrics: A Critical Review of Phase, Switching, Reliability, and Device Trade-Offs}},
  author = {Yuwei Cai and Yao Li and Zhongjian Gao and Qingzhu Zhang and Zhaohao Zhang and Wenxiu Dong and Wen Ren and Ruige Zhang},
  journal = {Nanomaterials (Basel, Switzerland)},
  year = {2026},
  month = sep,
  url = {https://europepmc.org/article/PMC/PMC13666695},
  note = {CC BY},
}

RIS

TY  - JOUR
TI  - Thickness Engineering in HfO2-Based Ferroelectrics: A Critical Review of Phase, Switching, Reliability, and Device Trade-Offs
AU  - Yuwei Cai
AU  - Yao Li
AU  - Zhongjian Gao
AU  - Qingzhu Zhang
AU  - Zhaohao Zhang
AU  - Wenxiu Dong
AU  - Wen Ren
AU  - Ruige Zhang
PY  - 2026
DA  - 2026/09/24
JO  - Nanomaterials (Basel, Switzerland)
UR  - https://europepmc.org/article/PMC/PMC13666695
SN  - 2079-4991
ER  -

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