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Peer-reviewedPublisher termsOptics Express

Reference-guided defocus estimation enables physics-guided image restoration in deep ultraviolet wafer microscopy

  • Xiangji Guo1
  • Yubo Wang2
  • Ming Ming1
  1. 1University of Chinese Academy of Sciences, Hangzhou Institute for Advanced Study
  2. 2Hangzhou Dianzi University
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Cite

BibTeXRIS
BibTeX
@article{guo2026referenceguided,
  title = {{Reference-guided defocus estimation enables physics-guided image restoration in deep ultraviolet wafer microscopy}},
  author = {Xiangji Guo and Yubo Wang and Ming Ming},
  journal = {Optics Express},
  year = {2026},
  month = oct,
  doi = {10.1364/oe.616126},
  url = {https://opg.optica.org/abstract.cfm?URI=oe-34-21-39815},
}
RIS
TY  - JOUR
TI  - Reference-guided defocus estimation enables physics-guided image restoration in deep ultraviolet wafer microscopy
AU  - Xiangji Guo
AU  - Yubo Wang
AU  - Ming Ming
PY  - 2026
DA  - 2026/10/12
JO  - Optics Express
DO  - 10.1364/oe.616126
UR  - https://opg.optica.org/abstract.cfm?URI=oe-34-21-39815
SN  - 1094-4087
ER  -