Skip to content
DraconiticResearch
Search Sources API
197,768 studies31 sourcesUpdated 50 min ago
Peer-reviewedLicence not statedOptics Express

Research on the mechanism of DBO measurement errors caused by wafer warpage and a U-turn compensation method

  • Wenxiao Zhang
  • Honghui Feng
  • Xu Wang
  • Yifeng Guo
  • Yi Song
  • Jing Wang
Open at sourceDOICite

Related

  1. Software compensation of trigger-synchronous control-frame errors in qubits and qudits
    Gaurav A. Tathed, Nicholas C. F. Zutt, Collin J. C. Epstein +1
    PRX QuantumPeer-reviewedCC BY 4.0Quantum physics & quantum informationCrossref
  2. Modeling and compensation of periodic nonlinear error in micro-displacement measurement using a reflective-sphere-based low-finesse Fabry-Pérot cavity
    Ju Wang, Xiaodong Chen, Hao Luo +3
    Optics ExpressPeer-reviewedPublisher termsOptics & photonicsCrossref
  3. A review of error analysis and compensation methods in white-light interferometric surface topography measurement
    Yudong Lian, Yudong Lian, Yudong Lian +10
    Frontiers in PhysicsPeer-reviewedCC BYFull textGeneral physicsDOAJ
  4. Leakage benchmarking with decohering subgroups in the presence of preparation and measurement errors
    Shawn Geller, Tongyu Zhao, Alex Kwiatkowski +3
    arXivPreprintarXiv licenceFull textQuantum physics & quantum informationarXiv
  5. Inverse identification of process-induced shrinkage strain for a B-stage thermoset resin in woven pre-impregnated lamina via warpage analysis
    Mickaël Leicht, Gautier Girard, Norman Mathieu +4
    Composites Part A: Applied Science and ManufacturingPeer-reviewedCC BY 4.0Full textGeneral physicsHAL

Cite

BibTeXRIS
BibTeX
@article{zhang2026research,
  title = {{Research on the mechanism of DBO measurement errors caused by wafer warpage and a U-turn compensation method}},
  author = {Wenxiao Zhang and Honghui Feng and Xu Wang and Yifeng Guo and Yi Song and Jing Wang},
  journal = {Optics Express},
  year = {2026},
  month = oct,
  doi = {10.1364/oe.615033},
  url = {https://opg.optica.org/oe/abstract.cfm?doi=10.1364/OE.615033},
}
RIS
TY  - JOUR
TI  - Research on the mechanism of DBO measurement errors caused by wafer warpage and a U-turn compensation method
AU  - Wenxiao Zhang
AU  - Honghui Feng
AU  - Xu Wang
AU  - Yifeng Guo
AU  - Yi Song
AU  - Jing Wang
PY  - 2026
DA  - 2026/10/19
JO  - Optics Express
DO  - 10.1364/oe.615033
UR  - https://opg.optica.org/oe/abstract.cfm?doi=10.1364/OE.615033
SN  - 1094-4087
ER  -