A review of error analysis and compensation methods in white-light interferometric surface topography measurement
4 affiliations
- 1Center for Advanced Laser Technology, Hebei University of Technology, Tianjin, China
- 2Hebei Key Laboratory of Advanced Laser Technology and Equipment, Hebei University of Technology, Tianjin, China
- 3Tianjin Key Laboratory of Electronic Materials and Devices, Hebei University of Technology, Tianjin, China
- 4Department of Physics, The University of Auckland, Auckland, New Zealand
Abstract
Surface topography directly affects the functionality and performance of workpieces, while its high-accuracy and repeatable measurement is essential for quality control and precision manufacturing. White-light interferometry, benefiting from the unique advantages of broadband low-coherence light sources, enables high-accuracy measurement while effectively avoiding phase ambiguity and related issues, and therefore plays an important role in surface metrology. However, various error sources in practical measurements can cause deviations from ideal measurement conditions, directly affecting the accuracy and reliability of surface topography reconstruction. Therefore, an in-depth investigation of error mechanisms and the development of effective compensation strategies are essential for ensuring the measurement reliability of white-light interferometry and promoting its application in broader engineering scenarios. This review systematically examines error processing in white-light interferometry. The fundamental principles of white-light interferometry are first described based on an interferometric signal model. The potential error sources and their physical mechanisms are then analyzed in detail, covering environmental vibration, sample characteristics, the batwing effect, and algorithmic errors. Research progress over the past two decades in suppressing these errors is systematically classified and summarized. Based on these developments, future trends in white-light interferometry are further discussed. This review aims to provide a systematic theoretical reference and technical guidance for error analysis and performance improvement in white-light interferometry.
Related
- Research on the mechanism of DBO measurement errors caused by wafer warpage and a U-turn compensation method
- Modeling and compensation of periodic nonlinear error in micro-displacement measurement using a reflective-sphere-based low-finesse Fabry-Pérot cavity
- A Spatial Light Modulator–Based Polarizing Nulling Interferometer for Quantitative Measurement of Multiple Optical Surface Geometries
- Measurement of Nanoscale Surface Disturbances on Liquid Jets Using the Mie Scattering Method
- Measurement-free Preparation of Surface-Code States with Digital-Analog Counterdiabatic Drivings
BibTeX
@article{lian2026review,
title = {{A review of error analysis and compensation methods in white-light interferometric surface topography measurement}},
author = {Yudong Lian and Yudong Lian and Yudong Lian and Yifan Shan and Yifan Shan and Luyang Xie and Xinyu Wang and Xinyu Wang and Yulei Wang and Yulei Wang and Yulei Wang and Zhiwei Lu and Zhiwei Lu},
journal = {Frontiers in Physics},
year = {2026},
month = oct,
doi = {10.3389/fphy.2026.1974701},
url = {https://doi.org/10.3389/fphy.2026.1974701},
note = {CC BY},
}
RIS
TY - JOUR
TI - A review of error analysis and compensation methods in white-light interferometric surface topography measurement
AU - Yudong Lian
AU - Yudong Lian
AU - Yudong Lian
AU - Yifan Shan
AU - Yifan Shan
AU - Luyang Xie
AU - Xinyu Wang
AU - Xinyu Wang
AU - Yulei Wang
AU - Yulei Wang
AU - Yulei Wang
AU - Zhiwei Lu
AU - Zhiwei Lu
PY - 2026
DA - 2026/10/23
JO - Frontiers in Physics
DO - 10.3389/fphy.2026.1974701
UR - https://doi.org/10.3389/fphy.2026.1974701
AB - Surface topography directly affects the functionality and performance of workpieces, while its high-accuracy and repeatable measurement is essential for quality control and precision manufacturing. White-light interferometry, benefiting from the unique advantages of broadband low-coherence light sources, enables high-accuracy measurement while effectively avoiding phase ambiguity and related issues, and therefore plays an important role in surface metrology. However, various error sources in practical measurements can cause deviations from ideal measurement conditions, directly affecting the accuracy and reliability of surface topography reconstruction. Therefore, an in-depth investigation of error mechanisms and the development of effective compensation strategies are essential for ensuring the measurement reliability of white-light interferometry and promoting its application in broader engineering scenarios. This review systematically examines error processing in white-light interferometry. The fundamental principles of white-light interferometry are first described based on an interferometric signal model. The potential error sources and their physical mechanisms are then analyzed in detail, covering environmental vibration, sample characteristics, the batwing effect, and algorithmic errors. Research progress over the past two decades in suppressing these errors is systematically classified and summarized. Based on these developments, future trends in white-light interferometry are further discussed. This review aims to provide a systematic theoretical reference and technical guidance for error analysis and performance improvement in white-light interferometry.
SN - 2296-424X
ER -