Self-organized Layered Structures of Nitrogen-Vacancy Centers with Preferential Orientation in Heteroepitaxial Diamond Films
Abstract
Here, we report the fabrication and characterization of single crystal diamond films on a two-inch wafer-scale containing three-dimensional layered structures of negatively charged nitrogen-vacancy color centers (NV−). The (100)-oriented layered diamond films were grown by chemical vapor deposition (CVD) to create spatially separated regions of enhanced emission associated with NV− centers. Such localized emission enhancement as well as 2D and 3D arrays of spins could enable close-packed architectures for emerging quantum devices, such as data processors, memory cells, and magnetic sensors. A cyclic sequence of CVD growth and oxygen-plasma etching is employed, resulting in the in-situ formation of layered inverted pyramidal structures with flat {111} sidewalls. These pits are subsequently overgrown by nitrogen-doped diamond to achieve NV−-rich facets with a uniform N-V bond arrangement and improved nitrogen incorporation efficiency.
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BibTeX
@misc{lebedev2026selforganized,
title = {{Self-organized Layered Structures of Nitrogen-Vacancy Centers with Preferential Orientation in Heteroepitaxial Diamond Films}},
author = {Vadim Lebedev and Alejandro Martínez-Méndez and Jesús Moreno-Meseguer and Jan Engels and Jürgen Weippert and Jan Kustermann and Felix Hoffmann and Javier Prior and Jan Jeske},
howpublished = {arXiv},
year = {2026},
month = oct,
doi = {10.48550/arxiv.2610.03150},
eprint = {2610.03150},
archivePrefix = {arXiv},
url = {https://arxiv.org/abs/2610.03150},
}
RIS
TY - UNPB
TI - Self-organized Layered Structures of Nitrogen-Vacancy Centers with Preferential Orientation in Heteroepitaxial Diamond Films
AU - Vadim Lebedev
AU - Alejandro Martínez-Méndez
AU - Jesús Moreno-Meseguer
AU - Jan Engels
AU - Jürgen Weippert
AU - Jan Kustermann
AU - Felix Hoffmann
AU - Javier Prior
AU - Jan Jeske
PY - 2026
DA - 2026/10/02
PB - arXiv
DO - 10.48550/arxiv.2610.03150
UR - https://arxiv.org/abs/2610.03150
AB - Here, we report the fabrication and characterization of single crystal diamond films on a two-inch wafer-scale containing three-dimensional layered structures of negatively charged nitrogen-vacancy color centers (NV^−). The (100)-oriented layered diamond films were grown by chemical vapor deposition (CVD) to create spatially separated regions of enhanced emission associated with NV^− centers. Such localized emission enhancement as well as 2D and 3D arrays of spins could enable close-packed architectures for emerging quantum devices, such as data processors, memory cells, and magnetic sensors. A cyclic sequence of CVD growth and oxygen-plasma etching is employed, resulting in the in-situ formation of layered inverted pyramidal structures with flat {111} sidewalls. These pits are subsequently overgrown by nitrogen-doped diamond to achieve NV^−-rich facets with a uniform N-V bond arrangement and improved nitrogen incorporation efficiency.
ER -