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Peer-reviewedPublisher termsMaterials Science in Semiconductor Processing

Influence of Al co-implantation on Ga distribution in p-type Ge

  • J. Perrin Toinin
  • A. Portavoce
  • M. Bertoglio
  • M. Descoins
  • M. Texier
  • D. Narducci
  • R. Daineche
  • K. Hoummada
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Cite

BibTeXRIS
BibTeX
@article{toinin2026influence,
  title = {{Influence of Al co-implantation on Ga distribution in p-type Ge}},
  author = {J. Perrin Toinin and A. Portavoce and M. Bertoglio and M. Descoins and M. Texier and D. Narducci and R. Daineche and K. Hoummada},
  journal = {Materials Science in Semiconductor Processing},
  year = {2026},
  month = oct,
  doi = {10.1016/j.mssp.2025.109877},
  url = {https://hal.science/hal-05786477v1},
}
RIS
TY  - JOUR
TI  - Influence of Al co-implantation on Ga distribution in p-type Ge
AU  - J. Perrin Toinin
AU  - A. Portavoce
AU  - M. Bertoglio
AU  - M. Descoins
AU  - M. Texier
AU  - D. Narducci
AU  - R. Daineche
AU  - K. Hoummada
PY  - 2026
DA  - 2026/10/08
JO  - Materials Science in Semiconductor Processing
DO  - 10.1016/j.mssp.2025.109877
UR  - https://hal.science/hal-05786477v1
SN  - 1369-8001
ER  -